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Zygo Applications
Zygo's instruments can be used in a wide variety of applications from precision manufacturing through to MEMS (Micro-Electro Mechanical Systems), optics, contact lenses and orthopaedic implants. Provided below is a list of a small section of these applications along with further details of how some of our customers have used the systems to measure critical parameters of their samples.
| Sector | Application |
| Automotive | Test inspection of diesel injectors & valve seats |
| Data Storage | Measurement of magnetic read/write heads for hard disk drives |
| Dynamic MEMS | Measure motion, displacement & key device parameters |
| Medical | Measure surface roughness and wear patterns of orthopaedic implants |
| Optics | Flatness measurement of ultra-precision optics |
| Pharmaceutical | QA of pill & capsule surfaces |
| Semiconductor | Measurement of semiconductor package interconnects, solder bumps and micro vias |
University of Newcastle MEMSens
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MEMSens is a biosensor being developed at the University of Newcastle by the team of Prof C. McNeil. It is targeted at ultra low concentration analyte detection, for example thyroglobulin mRNA for the detection of thyroid cancer. Once the device is manufactured, it undergoes a series of tests. A Zygo surface profilometer is extensively used in this process.
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The Tyndall Institute SIMSWITCH
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Research at Tyndall has developed a low-voltage capacitive shunt microswitch for use at radio frequencies, using a low-temperature, CMOS compatible fabrication process. The switch requires an operating voltage of 10-15 V, which represents a substantial improvement on many current devices that require a voltage of up to 70 V. RF performance is also promising: the switches have shown an insertion loss of -0.2 dB at 30 GHz and an isolation of -19.3 dB at 30 GHz
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SLS Optics
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SLS Optics are based on the Isle of Man and were founded in 1995. They make products based on etalons that use coated flat surfaces that are flat to better than 1/150 wave. Since its inception SLS Optics have been using the Zygo GPI-XP system to measure these optics with great success. However for some measurements related to mechanical wedge, the GPI-XP was reaching the limit of its capabilities.
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MEMS Application Note
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This article introduces some of the concepts behind Scanning White Light Interferometry (SWLI) for the measurement of Micro-Electro Mechanical Structures (MEMS) under static and dynamic operating conditions.
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Cranfield University
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These images show the indentation of a copper surface by a diamond tool. It is used to measure the flank tool wear through the profile analysis. By taking a sequence of indentations in a copper flat it is possible to monitor the tool wear over a period of time.
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Finsbury Orthopaedics Ltd
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This application was developed in collaboration with Finsbury Orthopaedics Ltd to enable measurement of the wear patterns and volumes on artificial hip joints.
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University of Leeds
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The large head and cup are a metal-on-metal resurfacing bearing, which has been tested at Leeds University to assess friction.
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Qinetiq Micromirror Arrays
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These videos show 2 sets of polysilicon surface micromachinied micromirror arrays designed and fabricated by QinetiQ that passed static white light interferometric inspection.
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