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Qinetiq Micromirror arrays
These videos show 2 sets of polysilicon surface micromachinied micromirror arrays designed and fabricated by QinetiQ that passed static white light interferometric inspection. On a simple actuation test, significant differences are apparent.
The first video shows a number of devices fail (significant non-uniformity in motion)
Download video (AVI 2.20 MB)
The second video shows the devices pass (uniform response).
Download video (AVI 1.10 MB)
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