The leading supplier of cutting edge technology

Micromirror Array Characterisation

Description: Qinetiq used a Zygo NewView Scanning White Light Interferometer to characterise an array of micromirrors.

Recommended Product: Zygo NewView 7000

These videos show 2 sets of polysilicon surface micromachinied micromirror arrays designed and fabricated by QinetiQ that passed static white light interferometric inspection. On a simple actuation test, significant differences are apparent.

The first video shows a number of devices fail (significant non-uniformity in motion)

Qinetiq Micromirror Arrays
Download video (AVI 2.20 MB)


The second video shows the devices pass (uniform response).

Qinetiq Micromirror Arrays
Download video (AVI 1.10 MB)