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Zygo High Performance Non-Contact Surface Metrology for Manufacturing and R&D Seminar

Zygo Open Seminar

Thursday, 8th May 2008

Dakota Eurocentral, Motherwell, Scotland

We are pleased to annouce the second Zygo Open Seminar, aimed at manufacturers and those involved in R&D who have an interest in high-performance metrology of surfaces.

The seminar is free, however you must pre-register to attend the seminar.

The seminar, held in association with the Scottish Optoelectronic Association , will provide:

  • An introduction to interferometric surface metrology for managers and technical personnel engaged in manufacturing or R&D
  • Gain a better understanding of the application of interferometry
  • Demonstrations of Scanning White Light and Fizeau Interferometers for detailed surface profiling and surface form measurement
  • An opportunity to have samples measured – contact us in advance for more details

Agenda

1.00 - 1.30pm
Registration & demonstrations
1.30 - 2.00pm
An Introduction to Interferometric Surface Metrology
Scanning white light and Fizeau interferometers are capable of height resolution in the sub-nanometre regime making them excellent tools for high precision 3D characterisation of surfaces including semiconductor components, diamond machinedand polished parts, MEMS devices and coatings. Applications are diverse, covering most of the manufacturing and R&D sector including: semiconductor manufacturing, medical, automotive and aerospace, in fact anywhere where accurate, non-contact and fast measurement of surfaces is required. This presentation will introduce high performance interferometric surface metrology and its applications.
Dr Carol David Daniel, Lambda Photometrics Ltd
2.00 - 2.30pm
Characterising MEMS: A Comparison of the Techniques Available
Characterisation is an important process in the development of any MEMS sensor. Newcastle University, utilise the optical techniques of vibrometry, interferometry and Raman spectroscopy. Case studies will be discussed which highlights the advantages of each of these techniques.
Dr John Hedley, University of Newcastle
2.30 - 3.30pm
Tea & coffee break & demonstrations
3.30 - 4.00pm
Imaging Ultrathin Polymer Films by Scanning White Light Interferometry
We show that scanning white light interferometry (SWLI) is capable of mapping macroscopic areas of ultrathin polymer films deposited on mica and silica substrates. SWLI can provide useful characteristics such as thickness and homogeneity of polymer monolayers. We discuss the conditions under which SWLI can give reliable results on these systems, its capabilities and its limitations. Vasileios Koutsos, University of Edinburgh
4.00 - 4.30pm
Q & A session & demonstrations

Click here to pre-register