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The MProbe system is a complete solution for measuring the thickness of single and multilayer translucent film stacks.
The MProbe series is a complete thin film measurement system, using a fibre optic probe for spectroscopic reflection or transmittance measurements. This approach yields a very compact and low-cost system. Careful design of critical components and the measurement optimisation software algorithms results in a remarkably precise and robust instrument.
Fast Set Up
With the MProbe you'll be ready to obtain measurements immediately – everything is included: spectrometer/light source unit, fibre optic probe, sample stage, software and reference wafer.
We can measure all manner of translucent films including multilayer stacks, thin films, thick films, freestanding and non-uniform layers. Possible measurements include single and multilayer film thicknesses, refractive index, extinction coefficient and surface roughness.
One Click Measurement
One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe!
TFC Companion software has all the sophisticated tools necessary for these measurements including sensitivity analysis, error-estimator, simulation, film stack switching, global optimisation, layers and materials linking, etc. for complicated applications development. Over 500 materials are contained in the library, and users can add and model their own materials. The raw reflectance and transmittance spectral data is also available for use in a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing.
TFCompanion software is also available separately as a stand-alone analysis package or for integration into OEM or on-line applications – contact us for details.
What’s in the box:
|Film Thickness||1nm to 1mm||Dependent on system configuration|
|Wavelength Range||200nm - 5000nm||Dependent on system configuration|
|Precision||0.1Å or 0.01%||s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample|
|Accuracy||0.2% or 10Å||Film stack dependent|
|Stability||0.2Å or 0.02%||2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample|
|Spot size||3 mm standard||Optional down to 3 µm|
|Sample size||from 1 mm|
MProbe System Configurations