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ZMI lasers provide frequency stabilized, two-frequency output to drive multiple measurement axes. The small ZMI 7705 is used with the ZMI 501 measurement enclosure to provide two axes of measurement, while the larger lasers provide more power (7702), water cooling (7714), and a separate laser module and delivery modules (7722/7724). A single laser can provide light for tens of measurement axes.
Zygo's ZMI products are designed and manufactured to world-class standards of reliability suitable for some of the most demanding applications found in semiconductor manufacturing facilities. To control and insure the quality of their laser heads, Zygo designs and manufactures its own proprietary laser tubes in a state of the art facility. The Zygo laser tube lifetime is in excess of 50,000 hours.