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Zygo has a full line of vacuum compatible interferometers and feedthroughs for applications ranging from 2-axis systems to complex multi-axis vacuum applications. This example ZMI system uses the 7702 laser, a 2402 2-axis VME measurement board, and vacuum-compatible, compact interferometers.
Light from the 7702 laser travels through a vacuum window into the vacuum system, where it is distributed with beam splitters and fold mirrors. The modular design of ZMI components allows great flexibility for positioning the interferometers inside the vacuum system. Measurement signals are collected by the fiber optic pickups in the vacuum system and transmitted through a vacuum feedthrough to the 2402 measurement board.