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This 3-axis ZMI example system shows how measurement systems can be expanded to accommodate additional axes of measurement. This example ZMI system uses the 7702 laser, two 2400 series VME measurement boards, and high stability plane mirror interferometers.
Light from the 7702 laser is distributed by a set of beam splitters and fold mirrors, and fed into the interferometers. Measurement signals are collected by the fiber optic pickups and transmitted to the 2402 measurement boards. An electrical reference jumper cable carries the reference from one measurement board to the next, allowing all axes to be sampled together with very low data age uncertainty.