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Enhanced Deep Uv Broadband Reflective Coatings

28 Oct 2004

Acton Research Corporation have announced the availability of a new A1+MgF2 optical coating which is optimised for increased reflectance at 193nm. Whilst delivering superior performance throughout the UV and visible wavelengths, the new coating offers more than 88% reflectance at 193nm. This improved deep UV performance will provide significant benefits for manufacturers of semiconductor metrology equipment and will be used in applications which include elliposmetry and thin film measurements. The coating will also provide enhanced performance of microscope objectives and spectrophotometers operating in the deep UV. Coating of a variety of glass substrates is possible, as is coating of customer supplied material in prototype or OEM quantities

Acton produces a wide range of optical components and coatings which are used in applications ranging from excimer laser eye correction and DUV lithography to analytical and biomedical instrumentation. Acton's instrumentation products include monochromators, spectrographs and complete spectroscopy systems used worldwide for industrial, OEM and research applications.

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