Verifire Asphere Non-Contact, 3D Asphere Measurement

19 April 2007

Zygo has introduced the third high end Fizeau interferometer in the Verifire Series. Following on from the Verifire AT, which reduced coherent artefact issues and the Verifire MST which can measure multiple surfaces in transmission simultaneously, the Verifire Asphere is a complete system for measuring rotationally symmetric aspheres, which form the majority of aspheres produced.

Using existing core technologies used in Zygo’s Verifire AT and ZMI displacement interferometer systems coupled with high precision motorised stages and standard transmission spheres the Verifire Asphere is able to measure aspheric surfaces with the following performance:

60 nm (λ/10) form uncertainty

≤3 nm (λ/200) ems repeatability

0.08mm height resolution

6 to 10 minutes total average cycle time (typical)

Test parts can be made of various materials including glass, metal, semiconductors, ceramics and plastics provided that they have a shiny, specular surface and a measurable central apex. Parts can range in diameter from 1mm to 130mm and up to 5kg in weight.

Also, the Verifire can measure more than just mild aspheres, test parts can deviate from a perfect sphere by up to 800 microns.

As well as its non-contact 3D measurement of aspheric surfaces the Verifire Asphere System also is a high end system for measuring flats, spheres and radius of curvature.

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Verifire Asphere Non-Contact, 3D Asphere Measurement

19 April 2007

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