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Compact Series Interferometers

ZMI Series - Displacement Measuring Interferometers


The Compact Series interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available.

Description LC Compact HSPMI LC 2-axis HSPMI Compact 3-axis HSPMI
Model: 2002-0xLC 2001-0xLC 2006-01
Measurement: Displacement Displacement, yaw Pitch, yaw, displacement
Number of axes: 1 2 3
Target: Plane mirror Plane mirror Plane mirror
Optical Resolution: λ/4 λ/4 λ/4
Maximum Input Beam Size: 3 mm 3 mm 3 mm
Vacuum Compatible Version Available: Yes Yes No
Fiber Optic Pickup Mounting Method: Mounted separately Mounted separately Integrated
Standard Mount: 2014-01 2014-02 7011B
High Precision Mount: 7013-03 7013-04 7013-01

Zygo's Beam Reducing Telescope, model 2010, can be used to reduce 6 mm beams to 3 mm beams suitable for the Compact Series interferometers. The Beam Reducing Telescope can be mounted on Zygo's standard interferometer mount model 7011B.