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Optical Profilers

Optical profilers from ZYGO and Zemetrics are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features.

Surface roughness image Zemetrics ZeGage NewView 700 NewView 7100 NewView 7200 NewView 7300
Model: Zemetrics ZeGage NewView 700s NewView 7100 NewView 7200 NewView 7300
Vert. Scan Speed: ≤21µm/s ≤15µm/s ≤26µm/s ≤26µm/s ≤135µm/s
Max Step Height: ≤20 mm ~150µm ~20mm ~20mm ~20mm
System Zoom: Fixed Fixed Fixed Manual Automated
Z Stage: Automated Manual Automated Automated Automated
X/Y Stage: Manual Manual Man or Auto (opt) Man or Auto (opt) Man or Auto (opt)
Field of View: ≤9mm ≤3.5mm ≤14mm* ≤14mm* ≤14mm*
Software: ZeMaps MetroPro MetroPro MetroPro MetroPro

*A larger field of view is possible with the megapixel camera and/or stitching option.

NewView™ optical profilers include our proprietary MetroPro® Software, while Zemetrics optical profilers run ZeMaps™ Software. You get advanced data analysis on any platform. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.

Further information

ZeGage

Zemetrics ZeGage 3D Optical Profler

Zemetrics ZeGage

Robust and affordable 3D Optical Profilers for precise surface metrology on the production floor. ZeGage is the ideal non-contact optical profiler for quantitative measurements of 3D form and roughness on precision machined surfaces.

  • Vibration resistant design provides robust metrology on production floor
  • ISO 25178 compliant texture results ensures confidence in your metrology
  • Non-contact metrology technique prevents potentially costly part damage and scrap
  • Area based measurement is insensitive to part lay
  • Measurements require no consumables

Features

Zemetrics ZeGage

The industrial design provides fast, accurate metrology in a compact, cost-effective package that can be located directly on the factory floor without the need for vibration isolation or specialized enclosures. And the interactive control software, ZeMaps™, provides easy and detailed visualization to help you control your process. Read more to see how ZeGage Power, Versatility and Value can benefit you.

Powerful Performance

  • Proprietary non-contact optical technology is resistant to vibration; no vibration isolation platforms or enclosures necessary.
  • Quantitative surface metrology with nanometer-level precision provides superior gage capability.
  • Correlation to 2D and 3D standards, and compliance to ISO/DIN 25178 surface roughness parameters.
  • High resolution 1 million pixel image sensor provides fast areal measurements in seconds for excellent surface detail and visualization.
  • Integrated autofocus and focus aid simplify part setup and minimize operator variability.
Versatility

  • Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
  • Selectable magnification and field-of-view with numerous imaging and system options.
  • Included ZeMaps software provides comprehensive tools for surface data visualization, analysis and reporting.
  • Heavy duty, T-slot compatible part positioning staging enables simple, repeatable fixturing and measurement.
Productivity and Value

  • Cost-effective price-to-performance ratio compared to alternative systems, including mechanical contact stylus profilers.
  • Compact, vibration-tolerant design for easy integration anywhere in your facility.
  • Non-contact method means no consumable replacement costs to worry about.
  • Simplified operation results in low training and service costs.
  • High-output, long-life LED light source for years of trouble-free operation.

Specifications

Zemetrics ZeGage Specs

Measurement Technique Non-contact, three-dimensional, scanning white light interferometry
Objectives 2.5x – 50x Standard Working Distance. 1x-10x Long Working Distance. Refer to the ZeScope Objective Chart for objective specifications
Z Stage 100mm travel. Head may be mounted at either of 2 heights for optimal work volume
Part Stage Manual Tip/Tilt with ±4° adj. Manual XY with 50×100 mm x/y travel. Integrated T-Slot plate for fixture attachment
Vertical Scan Range ≤20mm (objective dependent)
Data Scan Rate ≤23µm/sec
Maximum Data Points 1,048,576 per acquistion.
Optical Resolution 0.52µm to 9.50µm; objective dependent
Surface Topography Repeatability <3nm

NewView700 Series

Zygo NewView 700 Series

Affordable 3D Optical Profiler for R&D and Production

Zygo NewView 700 Series

The highly affordable NewView™ 700s provides fast, noncontact, three-dimensional inspection and quantitative surface topography measurement for both research and production applications. The NewView™ 700s easily measures a wide range of surfaces, including smooth, rough, flat, sloped and stepped surfaces.

  • Fast, non-contact 3D surface measurements
  • Sub-angstrom vertical resolution
  • Simple, flexible functionality
  • Cost-effective, compact platform

Features

The NewView 700 continues to deliver the level of precision and quality that has become the trademark of ZYGO's NewView family of products. Simply put, the NewView 700 delivers optimal value, in combination with proven precision and quality.

Using ZYGO's patented scanning white-light interferometry technology the NewView 700 easily measures smooth, rough, and stepped surfaces.

Profile heights ranging from < 1 nm up to 150 µm with <0.1 nm vertical resolution, independent of surface texture or magnification - all in a single scan! Get the precision you need in a single acquisition without the limitations associated with traditional phase measuring interferometry.

Zygo NewView 600
Flexibility

A key component of the NewView 700 is its configurability. Based on an open architecture, the system easily accommodates a wide range of sample sizes, materials, and textures. Standard accessories include a complete line of high quality interferometric objectives, manual and motorized turrets, and sample positioning stages. Also, a convenient breadboard is available to accept application specific custom fixturing. Whether you need a versatile system with all the options, or a dedicated production setup, the NewView 700 can be configured to meet your needs.

Simplicity

Many instruments claim to be easy to use but often fall short. Not the NewView 600! All measurements are fast, nondestructive and require no sample preparation. Areal surface data is rapidly acquired and processed, yielding more than 300,000 data points in seconds. Objectives are easily interchanged using quick-mount adapters or even faster when using a multi-position turret - providing you with the magnification, field-of-view, and resolution you need, when you need it.

Zygo NewView 600

Ergonomically positioned coarse, medium, and fine focus knobs, an on-screen Live Display, and automatic light level adjustment expedite sample setup. With the NewView 700, you won't find yourself continually reaching for frequently used controls.

Characterisation

And of course, the system is powered by ZYGO's comprehensive metrology software package, MetroPro , providing complete 3D and 2D surface characterization, visualization, and processing options. In addition to advanced analysis, user-friendly MetroPro includes instrument control, password protection, statistical databasing, programmable scripting, customizable layout, pass/fail criteria, and much more.

Not exactly sure what features you need today, or what you'll need tomorrow? The NewView 700 offers a full range of options and upgrades to meet your metrology and budgetary requirements, protecting your investment for years.

From cost-effective bench-top research tools, to dedicated production systems and sensors, the NewView 700 optical profiler offers a complete metrology solution for today's leading-edge research and production applications.

Specifications

NewView 700 Performance Specs

  • Vertical Resolution: <0.1 nm
  • Lateral Resolution: 0.36 to 5.2 µm
  • Scan Speed: Up to 15 µm/sec
  • Step Height Accuracy: 0.75%
  • Step Height Repeatability:
    < 0.1%, 1σ
  • Vertical Scan Range: Up to
    150 µm
NewView 700 System Specs

  • Technology: Patented scanning white light interferometry
  • Objectives: 2X, 2.5X, 5X, 10X, 20X, 50X, and 100X; long working distance objectives also available
  • Field-of-View: Selectable from 0.05 to 3.5 mm; objective dependent
  • Illuminator: Computer controlled,long-life white light LED
  • Measurement Array: 640x480, user selectable
  • Scanner: Closed-loop piezo-based

NewView 7000 Series

Zygo NewView 7000 Series

Advanced 3D Surface Optical Profiling and Measurement Systems

Zygo NewView 7000 Series
The NewView 7000 Series optical profilers are powerful tools for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are non-destructive, fast, and require no sample preparation.

  • Fast noncontact measurements
  • Sub-angstrom Z resolution
  • Leading-edge precision & gage capability
  • Enhanced optical imaging

Features

Measurement

The NewView 7000 systems can measure profile heights ranging from <1 nm up to 20000 µm repeatably and at high speeds.

Based on patented scanning white light interferometry (SWLI) technology, only the NewView 7000 Series delivers 0.1 nm height resolution, independent of surface texture, magnification, or feature height - all in a single scan, and for every measurement.

The NewView™ 7000 series 3D optical surface profilers easily measure a wide range of surfaces, including smooth, rough, flat, sloped, and stepped surfaces.

Two Models - Unlimited Potential

The 7100 and 7300 optical profilers both offer high-accuracy measurements, differing mainly in their standard features. The 7300 has several features that maximize capability and convenience and the 7100 provides affordable versatility in non-contact surface profiling.

Specifications

Feature NewView 7300 NewView 7100
Description Top of the range optical profiler Low cost optical profiler
Scan Speed ≤135 µm/sec ≤26 µm/sec
System Zoom Auto; multi. (3 pos) Fixed 0.75x
Max Scan Range ≤20 mm
RMS Repeatability <0.01 nm
Objectives From 1X to 100X
Max. Field of View 14 mm standard; 22 mm optional (with megapixel camera)
Turret Options Motorized or Manual (6 Position)
Z Stage Motorized (100 mm travel)
X-Y Stages Manual (100 mm travel) or Motorized (150 mm travel)
Tip/Tilt Stage Manual or Motorized
Encoded Z, X-Y Stage Yes (optional)

Applications

Zygo NewView 7000
  • Stress Analysis
  • Surface Structure Analysis
  • Inter-Process Control
  • Investigative Work
  • Final Inspection
  • MEMS
  • Flat panels
  • OLED
  • Cone Angles
  • Hole Positions
  • Component Behaviour
  • Etch Depths
  • Component Alignments
  • Failure Analysis
  • Film Analysis
  • MOEMS
  • Display Colour Filter
    Process Control
  • Line Widths
  • Orthopaedic Components
  • Diamond Machining Parts
  • Optical Surfaces