Zygo NewView 7000 Series

Advanced 3D Surface Optical Profiling and Measurement Systems

The NewView 7000 Series optical profilers are powerful tools for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are non-destructive, fast, and require no sample preparation.

Fast noncontact measurements

Sub-angstrom Z resolution

Leading-edge precision & gage capability

Enhanced optical imaging

Features

Profile heights ranging from <1 nm up to 20000 µm can be measured at high speeds. Based on patented scanning technology, only the NewView 7000 Series delivers 0.1 nm height resolution, independent of surface texture, magnification, or feature height - all in a single scan, and for every measurement!

Features

Non-contact, three-dimensional, scanning white light and optical phase-shifting interferometry

Measurement repeatability, ±0.1% at 1 Sigma

Vertical z-scan measurement range from 0.1 nm to 20000 µm

Optical microscope lateral resolution, > 0.36 µm to 9.5 µm

Data scan rate of up to 135 µm/sec with 0.1 nm height resolution

Step height accuracies of better than 0.75%

Step Height repeatability ≤0.1% @ 1 Sigma

RMS repeatability <0.1 RMS

Scan and display areas up to 150 mm x 150 mm

Automated X, Y and Z option available for production applications

The NewView 7000 includes Zygo's advanced and comprehensive, easy to use Metropro™ metrology software

Advanced surface metrology analysis: roughness, waviness, curvature, step heights, power spectra, bearing ratio, and much more

Windows XP operating system and latest generation Pentium-based PC

Accurate and quantitative surface characterisation with push button simplicity - just focus and measure

Non-destructive measurement - no sample contact or preparation required

User-definable pass/fail flagged results and password-protected applications

Specifications

NewView 7000 Series Product Comparison
Key Feature	NewView 7300	NewView 7200	NewView 7100
Scan Speed	≤135 µm/sec	≤26 µm/sec	≤26 µm/sec
System Zoom	Auto; multi. (3 pos)	Manual (single)	Fixed 0.75x
Max Scan Range	≤20 mm
RMS Repeatability	<0.01 nm
Objectives	From 1X to 100X
Max. Field of View	14 mm standard; 22 mm optional (with megapixel camera)
Turret Options	Motorized or Manual (6 Position)
Z Stage	Motorized (100 mm travel)
X-Y Stages	Manual (100 mm travel) or Motorized (150 mm travel)
Tip/Tilt Stage	Manual or Motorized
Encoded Z, X-Y Stage	Yes (optional)
	Zygo NewView 7300 Specifications	Zygo NewView 7200 Specifications	Zygo NewView 7100 Specifications

Applications

Stress Analysis

Surface Structure Analysis

Inter-Process Control

Investigative Work

Final Inspection

MEMS

Flat panels

OLED

Cone Angles

Hole Positions

Component Behaviour

Etch Depths

Component Alignments

Failure Analysis

Film Analysis

MOEMS

Display Colour Filter
Process Control

Line Widths

Orthopaedic Components

Diamond Machining Parts

Optical Surfaces