The leading supplier of cutting edge technology

NewView 7000 Series Advanced 3D Surface Optical Profiling and Measurement Systems

Precise, Quantitative, and Flexible Surface Characterization for Research, Development and Production

The NewView 7000 Series optical profilers are powerful tools for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are non-destructive, fast, and require no sample preparation.

Profile heights ranging from <1 nm up to 20000 µm can be measured at high speeds. Based on patented scanning technology, only the NewView 7000 Series delivers 0.1 nm height resolution, independent of surface texture, magnification, or feature height - all in a single scan, and for every measurement!


Features

  • Non-contact, three-dimensional, scanning white light and optical phase-shifting interferometry
  • Measurement repeatability, ±0.1% at 1 Sigma
  • Vertical z-scan measurement range from 0.1 nm to 20000 µm
  • Optical microscope lateral resolution, > 0.36 µm to 9.5 µm
  • Data scan rate of up to 135 µm/sec with 0.1 nm height resolution
  • Step height accuracies of better than 0.75%
  • Step Height repeatability ≤0.1% @ 1 Sigma
  • RMS repeatability <0.1 RMS
  • Scan and display areas up to 150 mm x 150 mm
Automated X, Y and Z option available for production applications

  • The NewView 7000 includes Zygo's advanced and comprehensive, easy to use Metropro™ metrology software
  • Advanced surface metrology analysis: roughness, waviness, curvature, step heights, power spectra, bearing ratio, and much more
  • Windows XP operating system and latest generation Pentium-based PC
  • Accurate and quantitative surface characterisation with push button simplicity - just focus and measure
  • Non-destructive measurement - no sample contact or preparation required
  • User-definable pass/fail flagged results and password-protected applications
    •

The NewView 7000 Series is powered by ZYGO's comprehensive metrology software package, MetroPro™, providing integrated instrument control and advanced 3D and 2D data analysis and visualization. User-friendly MetroPro includes easy measurement setup, automated control, password protection, data logging and SPC, programmable measurement recipes and scripting, customizable GUI, pass/fail limits and automatic flagging, stitching, data segmentation and histogramming, data masking, dimensional metrology, and more. A full suite of optional software development and processing modules are also available, including machine vision, films analysis, and dynamic metrology, in addition to other specialized applications.

Two Models - Unlimited Potential

Zygo NewView 7000

Both the Model 7200 and 7300 offer high-accuracy measurements, differing mainly in their standard features. The Model 7300 has several features that enhance capability and convenience, such as: higher-speed scan rates for faster measurements, an aperture stop which enable fine optimization of the illumination for each measurement, and an automated system zoom for fast and easy magnification switching.

Zygo Newview 7000 Features

  • Profile step heights up to 20 mm
  • SLWD, LWD, & standard objectives
  • Automated system zoom
  • Automated light level control
  • Ultra-long-life LED white light source
  • Motorized X-Y stage, 150 mm travel
  • Motorized Z stage, 100 mm travel
  • Motorized 6-pos. objective turret
  • Up to 992 x 992 field of view
  • Flexible & upgradable architecture
  • High-speed camera
  • MetroPro™ software analysis
  • Constant <0.1 nm Z-resolution (regardless of magnification)
    •

NewView Applications

Zygo NewView 7000
  • Stress Analysis
  • Surface Structure Analysis
  • Inter-Process Control
  • Investigative Work
  • Final Inspection
  • MEMS
  • Flat panels
  • OLED
  • Cone Angles
  • Hole Positions
  • Component Behaviour
  • Etch Depths
  • Component Alignments
  • Failure Analysis
  • Film Analysis
  • MOEMS
  • Display Colour Filter
    Process Control
  • Line Widths
  • Orthopaedic Components
  • Diamond Machining Parts
  • Optical Surfaces
    •

Customer-Focused Solutions

ZYGO has developed the reputation and unique competence to partner closely with our customers to design, develop and deliver value-added metrology solutions. These customized solutions include large part inspection systems with extended stage travel, optical imaging accessories, custom software development, industrial packaged enclosures, part fixtures, and integrated metrology modules for our OEM partners. Our dedicated team of professionals and best-in-class hardware will ensure that you receive total customer satisfaction with our metrology equipment and services.

Additionally, ease-of-use and productivity can be maximized using configurable hardware and automation options; including motorized stages, autofocus, and motorized turret and system zoom for reliable and optimized process metrology.

Not exactly sure what features you need today, or what you'll need tomorrow? The NewView 7000 Series offers a full range of options and upgrades to meet your metrology needs and your budget, protecting and growing your investment for years.

A wide range of standard and Super-Long-Working-Distance (SLWD) objectives are available to meet almost any metrology task, including a low-magnification 1.0X, a high-magnification 100X. (See spec sheets for details.) Objectives can be easily installed onto a 6-position manual or motorized turret, or used singly with quick-mount adapters. The NewView 7000 Series can resolve sub-micron X-Y features, and profile areas up to 150 x 150 mm and larger with image stitching. Get all the field size and resolution you need, when you need it. Range, resolution, and flexibility are no longer a trade-off.


Learn More About It . . .

Click on the appropriate links below to obtain PDF files of informative literature.

Brochure for NewView 7000 Series
NewView 7200 Spec Sheet
NewView 7300 Spec Sheet