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VeriFire™ Series

Zygo's VeriFire Series further exceeds the performance of the industry-standard Zygo GPI products with capabilities and features that include mechanical phase acquisition, superior optics quality, high-resolution CCD cameras, vibration correction software, aspheric surface metrology and patented artifact suppression technology. While all VeriFire models can perform standard interferometric metrology, each model offers a unique capabilities that set it apart in the industry.

Model Core Technology Source Zoom Focus Camera Resolution Camera Frame Rate
XPZ Phase Shifting Interferometry (PSI) Point Source Motorised 1-6X Motorised 640 x 480 pixels 75 Hz
QPZ Phase Shifting Interferometry (PSI) Point Source Motorised 1-6X Motorised 640 x 480 pixels 210 Hz
ATZ Phase Shifting Interferometry (PSI) Point Source and Ring of Fire (artifact suppression) Encoded 1-5X Encoded (stepper focus) 1000 x 1000 pixels 43 Hz
MST Fourier Transform Phase Shifting Interferometry Point Source and Ring of Fire (artifact suppression) Encoded 1-5X Encoded (stepper focus) 1000 x 1000 pixels 43 Hz
Asphere PSI with proprietary asphere algorithms Point Source and Ring of Fire (artifact suppression) Encoded 1-5X Encoded (stepper focus) 1000 x 1000 pixels 43 Hz

VeriFire XPZ - The VeriFire XPZ achieves excellent accuracy and repeatability using phase modulation, a 640 x 480 pixel digital camera, and ZYGO's powerful MetroPro data acquisition and analysis software.

VeriFire QPZ - The VeriFire QPZ is configured for accurate metrology in production environments. The QPZ systems includes a high speed digital camera which provides rapid data acquisition enabling accurate phase acquisition in the presence of nominal production vibrations. This system also includes ZYGO's patented QPSI acquisition capability which enables accurate on-axis metrology in the presence of large production vibrations by shortening the camera shutter rate

VeriFire ATZ - The VeriFire ATZ represents ZYGO's highest performance interferometer with mechanical phase acquisition. The ATZ comes standard with a 1000 x 1000 pixel CCD camera for high resolution metrology, ZYGO's proprietary Ring of Fire™ illumination system for artifact suppression and encoded zoom and focus capabilities which minimize variability among operators.

VeriFire MST - The VeriFire MST utilizes a wavelength shifting laser and patented data acquisition methods to enable simultaneous measurement of the front and back surface of transparent optics, thickness variation (including wedge) and simple 2-step homogeneity metrology without difficult part preparation or messy coatings.

VeriFire Asphere - The first metrology tool for fast, noncontact, high-accuracy 3D metrology of aspheric surfaces. Production-friendly features include automated alignment, acquisition, and analysis.

Key Features

  • High performance interferometers for production, quality control and research and development applications.
  • Wide range of metrology capabilities from flats to spheres to conics and aspheres.
  • New hardware and software features provide unmatched value.
  • Increase production throughput by minimizing operator variability.
  • Proprietary artifact suppression capability.

Capability-Expanding Products

Accessories - ZYGO offers a wide variety of accessories to expand or enhance the capabilities of your interferometer system.

Large Aperture Systems - ZYGO offers Large Aperture Systems in 12", 18" 24" and 32" apertures, which can be used to measure both surface form and transmitted wavefront quality.

Expanded Wavelength Capabilities - ZYGO's precise phase-shifting interferometer solutions are available in several additional wavelengths ranging from 248 nm to 10.6 µm.