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Zygo VeriFire ATZ

VeriFire ATZ

Coherent Artifact Suppression - New Technology from ZYGO

Introducing the new VeriFire ATZ™ from Zygo Corporation, the next-generation interferometer family. ZYGO has recreated the interferometer for the highest level of commercial performance and the fastest methods to acquire results. Combining unique illumination, revolutionary data acquisition, and a finely tuned electro-optical imaging system, the VeriFire provides you with the technical leadership you expect from ZYGO.

The Ring of Fire™ illumination system is the basis of the VeriFire's clean interferometer image. Standard interferometers use a coherent point source to make interference easy to produce in the optical test cavity. However, a point source also creates spurious interference ("bullseyes") at every particle of dust that finds its way into the interferometer optical path over time.

The unique VeriFire Ring of Fire illumination is a partial coherence illuminator that localizes the interference to the optical cavity. Therefore, artifacts formed by dust outside the interferometric cavity are suppressed, enhancing the VeriFire's performance.


Point Source

Coherent artifact suppression using a point source, and the Ring of Fire, in the VeriFire ATZ interferometer


Ring of Fire

Dust was applied to the VeriFire optics to dramatize the Ring of Fire's superior performance

Lithography lenses, space optics, etalon surfaces and complex commercial optical systems continue to press the requirement for higher performance measurement technology to quantify new parameters to tighter tolerances. Enjoy unmatched measurement repeatability and accuracy with the Ring of Fire coherent artifact suppression system, where "bullseyes" are effectively suppressed, no longer mistaken for striae or high-frequency tooling marks. The VeriFire outperforms today's standard interferometers and will meet your most demanding requirements.

VeriFire, MetroPro™ software, and ZYGO's large range of setup possibilities provide enhanced flexibility and ease of use over previous generation interferometers.