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Zygo NewView 6000 Specifications


Measurement technique Noncontact, three-dimensional, scanning white light and optical phase-shifting interferometry


Scanner Closed loop piezo based, with highly linear capacitive sensors


Objectives


0.5x, 1x, 2.5x, 5x, 10x, 20x, 50x, 100x Long working distance (20mm), Super long working distance (40mm) and Thermally Compensated objectives are also available


Objective mounting options Single objective dovetail, Manual 6 position turret, Motorized 6 position turret


Image Zoom


NV6300 – 3 position motorized Zoom. NV6200 – Single manually switchable Zoom lens. Zoom options from - 0.5, 0.75, 1.0, 1.5, 2.0


Field of View

0.04 mm to 14 mm single field of view. Measurement of larger areas using stitching


Illuminator Long Life LED filtered white light with selectable coherence


Focus Motorized focus. Manual, Auto or Automated


Measurement Array

Selectable, Standard includes 640 x 480, 320 x 240, 160 x 120, Optional 992 x 1004


Part viewing Secondary 15 inch LCD Monitor


Z stage

DC Brushless microstepper motor, 100mm range, 0.1µm resolution


Computer

Latest Generation High performance Dell PC operating under Windows XP


Software Zygo MetroPro


Vertical Scan Range 150µm, Optional up to 15mm


Vertical Resolution Up to 0.1nm


Lateral Resolution 0.45 t0 11.2 µm objective dependent


Data scan rate Sampling array dependent up to 85 µm / second


Maximum number of data points Sampling array dependent max - 995968



RMS repeatability <0.1nm RMS


Step Height


Sampling array dependent –
Accuracy ≤0.75%
Repeatability ≤0.1% @1α


Material

Various surfaces : Opaque, transparent, coated, uncoated, specular and non specular


Max size (HxWxD) 89 x 203 x 203 mm (larger samples possible)

Click on the appropriate links below to obtain PDF files of specification data.

NewView 6200 specification sheet
NewView 6300 specification sheet