The leading supplier of cutting edge technology

Displacement

ZMI Series Displacement Measuring Interferometer Systems

Zygo is the technology and application support leader in heterodyne displacement interferometry. Zygo offers complete solutions and support for your metrology application. An extensive line of standard products is only the beginning; Zygo also provides:

  • A world class engineering partnership
  • Mechanical and optical design expertise
  • Assembly and tooling support to help reduce your manufacturing costs, and improve your system accuracy
  • Custom optical fabrication of stage mirrors, "L" mirrors and low mass, low thermal expansion monolithic structures
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There are thousands of ZMI systems performing in the most demanding of applications. Zygo's technology and products have been field proven over many years of use in leading edge products and standards laboratories worldwide.

Typical Applications

  • Lithography tools: optical steppers and scanners, e-beam & laser mask writers
  • Metrology tools: mask, wafer and LCD inspection and measurement tools, CD-SEM's
  • Process equipment: memory repair tools, probers, die bonders, drilling tools
  • Calibration: measurement and calibration of high resolution or high frequency mechanical motions

Key Features:

  • Heterodyne displacement interferometry.
  • Highly stable, easy to align, and insensitive to signal amplitude changes.
  • Extremely robust for OEM applications.
  • A single laser source can support multiple axes.
  • High signal to noise phase measurements eliminate false counts, even at zero slew rates.

Configure a system that is exacty right for you


Zygo offers a variety of:


This modular approach allows you to configure a system that best suits your needs by selecting the most appropriate components. Click here for further information.

Technical paper entitled "High-resolution, High-speed, Low Data Age Uncertainty, Heterodyne Displacement Measuring Interferometer Electronics"(149k)