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Measurement Boards

ZMI Series - Displacement Measuring Interferometers

ZMI measurement boards calculate displacement using optical signals from the interferometers and an optical reference signal from the laser. The ZMI 501A provides two axes of measurement in a stand-alone enclosure. All other ZMI measurement boards are used in a VME chassis. Multiple boards may be used together in the same chassis for applications requiring up to 64 axes of measurement.

Model	501A	2400	4000	4100C
Number of Axes/Board:	2	1 or 2	4	4
Board Type:	Enclosure	6U VME	6U VME64x	6U VME64x
Minimum Optical Power:	8.0 µW	1.9 µW	1.0 µW	0.07 µW
Cyclic Error Compensation:	No	No	No	Yes
Position Resolution:	1.23 nm	0.31 nm	0.15 nm	0.15 nm
Velocity Range at Full Resolution:	±0.475 m/s	±2.1 m/s	±2.55 m/s	±2.55 m/s
Max Acceleration:	10g	100g	100g	100g
Data Age Uncertainty:	NA	±1.2ns	±0.2ns (one board)/±1.0ns (multiple boards)	±0.2ns (one board)/±1.0ns (multiple boards)
Accuracy at Max Velocity (δ):	1.6nm	0.5nm	0.2nm	0.2nm
Compatible Laser(s):	7705	7702, 7714, & 7724	7702, 7714, & 7724	7702, 7714, & 7724