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Flat Panel Application DMI System

Example Systems - ZMI Series


Applications for processing LCD substrates can involve large beam paths and stage tilt, introducing large beam shear. A combination of the ZMI 7714 laser with an 8 mm beam diameter and ZMI 4004 measurement boards provides a robust solution for large beam shear applications.

ZMI 4000 series measurement boards require a VME64x chassis, which ZYGO does not supply.

Bill of Materials


Item Qty Model # Description Part #
1 3 4004 Four-axis measurement board 8020-0102-02
2 2 - Electrical reference jumper cable 1115-800-279
3 1 7714 Laser Head, 8mm Beam, Class IIIa, 1250µW 8070-0279-01
4 1 – Compact laser head cradle 8070-0154-01
5 1 7025 10% beam splitter 6191-0138-09
6 2 7000 33% beam splitter 6191-0138-01
7 8 7001 50% beam splitter 6191-0138-02
8 6 7007 Fold Mirror 6191-0138-03
9 17 7010B Beam splitter/Fold Mirror Mount 6191-0445-01
10 12 8006A High Performance HSPMI Straight beam, FOP right, horizontal mount 8080-0342-72
11 12 - Fiber optic cable assembly, 30 m 8020-0410-10
12 1 - Fiber optic cable assembly, 10 m 8020-0410-04
13 1 - ZMI laser Head Power Supply 8010-0105-01
14 1 - Laser head cable, power and RS-232, 4 m 1115-801-346