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Zygo MESA

MESA - Surface Flatness Measuring Instrument

An introduction to Zygo Mesa

Product Description

The MESA Flatness Measuring Tool provides the flatness measurements that are required on a increasing number of surfaces. It provides the feedback to grinding, honing, polishing, lapping, and super-finishing processes that permits these machines to produce more consistent and reliable parts. It provides information about these surfaces that allows you to improve and refine your process to maximize throughput and yield. The MESA provides accurate, repeatable, fast, cost-effective, and safe flatness measurements for a wide range of surface roughness and departures. MESA can be easily configured as a manually-operated system or is available fully automated for production floor operation.

Experience that Counts

Optical metrology can generally be divided into two categories - interferometric and geometric. The advantage of interferometric metrology is extremely high accuracy, on the order of a few nanometers, making it well suited for testing surfaces on precision optical components. Geometric metrology is much more forgiving of surface roughness and deformations, making it more appropriate for measuring machined metal parts. Prior to MESA, there was very little overlap between the two techniques.

Precision Metrology

Based on years of Zygo experience in precision metrology, MESA bridges the gap between interferometric and geometric optical metrology thanks to its innovative use of diffractive optics. MESA extends flatness measurement capabilities while maintaining the inherent advantages of interferometric measurements. These advantages include fast 3-D surface analysis, high spatial measurement resolution, excellent measurement repeatability and reproducibility, and a large working distance to the test surface. Most importantly, MESA extends the range of interferometry without relying on expensive or exotic components.