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Zygo MESA Specifications

Mesa LD / Mesa LU Key Specifications

System/Performance

Field of View
96 mm (3.8 in.) maximum diameter
Magnification
1X and 2X standard
Dynamic Range
0.15 mm (0.006 in)
Vertical Resolution
0.002 µm (0.08 µin)
System Accuracy
≤:0.2 µm (≤:8.0 µin) over 100 consecutive measurements
Data Acquisition Time
< 5 seconds
Data Analysis Time
< 5 seconds
Repeatability
≤:0.010 µm RMS, 1 sigma (≤:0.4 µin RMS 1 sigma) on a single sample measurement (using reference artifact)
≤:0.060 µm RMS,1 sigma (≤:2.4 µin RMS 1 sigma) including part removal and replacement
(using reference artifact)

Test Part Specifications

Preparation
None (typically); measurements are noncontact and non-destructive,and are performed under ambient conditions
Surface Treatment
Various, including ground, lapped, milled, microfinished, honed, polished, superfinished, fly cut, fineblanked, diamond turned, and coated
Sample Weight
20 kg (45 lb) maximum (MESA LD}
1.4 kg (3 lb) maximum (MESA LU)
Sample Size
250 mm (10 in) maximum per side (MESA LD)
100 mm (4 in) maximum per side (MESA LU)
Reflectivity
Various reflectivities (for example, near-specular precision turned to near-opaque lapped)from all types of machined, formed, and natural surfaces
Roughness (Ra)
2.5 µm (100 µin.) maximum
Form (Flatness) Error
0.15 mm (0.006 in.) maximum, with a maximum slope error of 0.03 mm/cm (0.012 in/0.4 in)
Maximum Measurable Feature Size
0.4 mm (0.016 in.) @ 1X0.2 mm (0.008 in.) @ 2X

*Specifications are subject to change without notice.