Zygo ZMI Displacement Measurement Interferometers

ZMI - Displacement Measuring Interferometer Systems

ZYGO is the technology and application support leader in heterodyne displacement interferometry. ZYGO offers complete solutions and support for your metrology application. An extensive line of standard products is only the beginning; ZYGO also provides:

A World class engineering partnership

Mechanical and optical design expertise

Assembly and tooling support to help reduce your manufacturing costs, and improve your system accuracy

Custom optical fabrication of stage mirrors, "L" mirrors and low mass, low thermal expansion monolithic structures

There are thousands of ZMI systems performing in the most demanding of applications. ZYGO's technology and products have been field proven over many years of use in leading edge products and standards laboratories worldwide.

Typical Applications

Lithography tools: optical steppers and scanners, e-beam & laser mask writers

Mask, wafer and LCD inspection and measurement tools, CD-SEM's

Process equipment: memory repair tools, probers, die bonders, drilling tools

Measurement and Calibration of high resolution or high frequency mechanical motions

Single point diamond turning machine control

From the industry's highest resolution system, the ZMI 2000, to the new price and performance benchmark, the ZMI 501

ZMI 500 System Specifications

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ZMI 2000 System Specifications

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ZMI 4000 System Specifications

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ZMI-4000 electronics provide increased resolution and velocity (0.15nm at up to 2.55m/sec with 2-pass PMI).

Reliability

ZYGO's ZMI products are designed and manufactured to world-class standards of reliability suitable for some of the most demanding applications found in semiconductor manufacturing facilities. To control and insure the quality of our laser heads, ZYGO designs and manufactures our own proprietary laser tubes in a state of the art facility. The ZYGO laser tube lifetime is in excess of 50,000 hours.