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Laser Heads

ZMI Series - Displacement Measuring Interferometers

ZMI lasers provide frequency stabilized, two-frequency output to drive multiple measurement axes. The small ZMI 7705 is used with the ZMI 501 measurement enclosure to provide two axes of measurement, while the larger lasers provide more power (7702), water cooling (7714), and a separate laser module and delivery modules (7722/7724). A single laser can provide light for tens of measurement axes.

Zygo's ZMI products are designed and manufactured to world-class standards of reliability suitable for some of the most demanding applications found in semiconductor manufacturing facilities. To control and insure the quality of their laser heads, Zygo designs and manufactures its own proprietary laser tubes in a state of the art facility. The Zygo laser tube lifetime is in excess of 50,000 hours.

Model	7705	7702	7714	7722/7724
Split Frequency:	3.6 MHz (Zeeman)	20 MHz (AOM)	20 MHz (AOM)	20 MHz (AOM)
Output Power:	>250 µW	>400 µW	>1350 µW	>900 µW per DM*
Laser Classification:	Class II	Class II	Class IIIa	Class IIIa
Frequency Stability:	± 10 ppb	± 2 ppb	± 0.5 ppb	± 0.5 ppb
Beam Size:	4 mm	3 or 6 mm	6 or 8 mm	6 or 10 mm
Heat Dissipation:	7 W	39 W	8 W	LM: 5 W DM: 0.02 W
Expected Laser Tube Life:	20,000 hours	50,000 hours	50,000 hours	50,000 hours
Cooling Method:	Air	Air	Water	Water
Optical Isolation:	No	No	Yes	Yes