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Thin Film Measurement System

MProbe

The MProbe system is a complete solution for measuring the thickness of single and multilayer translucent film stacks.

  • Non-contact measurement
  • Spectroscopic technique
  • Multilayer film stacks
  • 1nm to 1mm layer thickness (system dependent)
  • Measure thickness, refractive index, surface roughness
  • Cost effective solution

Download MProbe Datasheet

Description

The MProbe series is a complete thin film measurement system, using a fibre optic probe for spectroscopic reflection or transmittance measurements. This approach yields a very compact and low-cost system. Careful design of critical components and the measurement optimisation software algorithms results in a remarkably precise and robust instrument.

Fast Set Up

With the MProbe you'll be ready to obtain measurements immediately – everything is included: spectrometer/light source unit, fibre optic probe, sample stage, software and reference wafer.

Multilayer Films

We can measure all manner of translucent films including multilayer stacks, thin films, thick films, freestanding and non-uniform layers. Possible measurements include single and multilayer film thicknesses, refractive index, extinction coefficient and surface roughness.

One Click Measurement

One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe!

Powerful Software

TFC Companion software has all the sophisticated tools necessary for these measurements including sensitivity analysis, error-estimator, simulation, film stack switching, global optimisation, layers and materials linking, etc. for complicated applications development. Over 500 materials are contained in the library, and users can add and model their own materials. The raw reflectance and transmittance spectral data is also available for use in a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing.

TFCompanion software is also available separately as a stand-alone analysis package or for integration into OEM or on-line applications – contact us for details.

Powerful Software

What’s in the box:
  • Main unit includes spectrometer(s), light source, electronics
  • Reflectance probe
  • Sample table with reflectance probe holder
  • TFCompanion – Reflectance software CD (advanced version) plus USB dongle licence
  • Calibration sample (Si or Al depending on system purchased)
  • USB cable (connecting main unit to computer)
  • Universal power adapter (110V/220V)
  • Hardcopy of User Manual

Specifications

MProbe Specifications
Parameter Value Notes
Film Thickness 1nm to 1mm Dependent on system configuration
Wavelength Range 200nm - 5000nm Dependent on system configuration
Precision 0.1Ε or 0.01% s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample
Accuracy 0.2% or 10Ε Film stack dependent
Stability 0.2Ε or 0.02% 2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample
Spot size 3 mm standard Optional down to 3 µm
Sample size from 1 mm

MProbe System Configurations

System Configuration

Model Wavelength range/nm Spectrometer/Detector Light Source Thickness Range
VIS 400-1100 Spectrometer F4/Si CCD 3600pixels/ADC - 16 bit Tungsten-Halogen 15nm-20mm (50µmm option) High-precision measurements
UV-VIS-SR 200-1100 Spectrometer F4/Si CCD 3600pixels/16 bits ADC - 16 bit Deuterium/Tungsten-Halogen 1nm-20mm(50µm option)
HR-VIS 700-1000 Spectrometer F4/Si CCD 3600 pixels/ADC 16 bit/resolution <0.25nm Tungsten-Halogen 1um-400µm
NIR 900-1700 F2 Transmission InGaAs PDA 512 pixels, ADC - 16 bit Tungsten-Halogen 100nm-200µm
VIS-NIR 400-1700 Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA)/ADC - 16 bit Tungsten-Halogen 15nm-200µm
UV-VIS-NIR 200-1700 Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and InGaAs 512)/ADC - 16 bit Deuterium/Tungsten-Halogen 1nm-200µm
NIR-SCAN 900-5000 Scanning spectrometer/InGaAs, MCT detectors/ADC 24 bits Tungsten-Halogen/SiN (IR source) 100nm-800µm
XT 1590-1650 F2 Transmission/InGaAs PDA 512 pixels, ADC - 16 bit Tungsten-Halogen 10µm-1mm

Applications

Laboratory, At-line, On-line and OEM measurement solutions for
  • Semiconductors – Si, aSi, polySi
  • Compound Semiconductors – AlGaAs, InGaAs, CdTe,CIGS
  • Photoresists
  • Polymer coatings – Paralene, PMMA, Polyamides
  • Thin Films – Oxides, Nitrides, Metal films
  • Solar Cells – aSi,TCO, CIGS, CdS, CdTe, OLED stacks
  • LCD, FPD application – ITO, Cell Gaps, Polyamides
  • Optical Coatings – Dielectric filters, Hardness coatings, AR coatings