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Standard Series Interferometers

ZMI Series - Displacement Measuring Interferometers


These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

Zygo's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all Zygo's interferometers.

Description HSPMI High performance HSPMI Single beam Interferometer (SBI) Linear Interferometer (LI)
Model: 7006A 8006A 7005 7002
Measurement: Displacement Displacement Displacement Displacement
Number of axes: 1 1 1 1
Target: Plane mirror Plane mirror 7004 Retro reflector 7003 Retro reflector
Optical Resolution: λ/4 λ/4 λ/2 λ/2
Maximum Input Beam Size: 8 mm 8 mm 8 mm 8 mm
Vacuum Compatible Version Available: Yes Yes Yes Yes
Fiber Optic Pickup Mounting Method: Mounting features included Factory mounted Mounting features included Mounting features included
Standard Mount: 7011B 7011B 7011B 7010B
High Precision Mount: 7013-01 7013-01 7013-01 7013-02