Standard Series Interferometers
ZMI Series - Displacement Measuring Interferometers
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These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. Zygo's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all Zygo's interferometers. |
| Description | HSPMI | High performance HSPMI | Single beam Interferometer (SBI) | Linear Interferometer (LI) |
| Model: | 7006A | 8006A | 7005 | 7002 |
| Measurement: | Displacement | Displacement | Displacement | Displacement |
| Number of axes: | 1 | 1 | 1 | 1 |
| Target: | Plane mirror | Plane mirror | 7004 Retro reflector | 7003 Retro reflector |
| Optical Resolution: | λ/4 | λ/4 | λ/2 | λ/2 |
| Maximum Input Beam Size: | 8 mm | 8 mm | 8 mm | 8 mm |
| Vacuum Compatible Version Available: | Yes | Yes | Yes | Yes |
| Fiber Optic Pickup Mounting Method: | Mounting features included | Factory mounted | Mounting features included | Mounting features included |
| Standard Mount: | 7011B | 7011B | 7011B | 7010B |
| High Precision Mount: | 7013-01 | 7013-01 | 7013-01 | 7013-02 |