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Residual Gas Analyzers

Residual Gas Analyzers

The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA's provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit ...
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  1. SRS RGA100 Residual Gas Analyser

    SRS RGA100 Residual Gas Analyser

    • 100 amu system
    • Better than 1 amu resolution
    • 6 decades of dynamic range
    • 5E14 Torr detection limit
    • RGA Windows & LabVIEW software
    • Field-replaceable electron multiplier and filament
    • RS-232 interface
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  2. SRS RGA200 Residual Gas Analyser

    SRS RGA200 Residual Gas Analyser

    • 200 amu system
    • Better than 1 amu resolution
    • 6 decades of dynamic range
    • 5E14 Torr detection limit
    • RGA Windows & LabVIEW software
    • Field-replaceable electron multiplier and filament
    • RS-232 interface
    Learn More

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  3. SRS RGA300 Residual Gas Analyser

    SRS RGA300 Residual Gas Analyser

    • 300 amu system
    • Better than 1 amu resolution
    • 6 decades of dynamic range
    • 5E14 Torr detection limit
    • RGA Windows & LabVIEW software
    • Field-replaceable electron multiplier and filament
    • RS-232 interface
    Learn More

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  4. SRS PPM100 Partial Pressure Monitor For RGA

    SRS PPM100 Partial Pressure Monitor For RGA

    • Stand-alone RGC controller
    • 8-channel process control
    • Pressure vs. time curves
    • 4 analog input/output ports
    • RS232, GPIB and USB interfaces
    • Web enabled
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  5. SRS CIS100 Closed Ion Source Gas Analyser

    SRS CIS100 Closed Ion Source Gas Analyser

    • 100, 200, and 300 amu systems
    • 1 ppm detection
    • 10 mTorr max. operating pressure
    • 1 x 10-12 Torr detection limit
    • Real-time RGA Windows software
    • Multi-head operation
    • Field-replaceable electron multiplier and filament
    • RGA and CIS mode
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  6. SRS CIS200 Closed Ion Source Gas Analyser

    SRS CIS200 Closed Ion Source Gas Analyser

    • 100, 200, and 300 amu systems
    • 1 ppm detection
    • 10 mTorr max. operating pressure
    • 1 x 10-12 Torr detection limit
    • Real-time RGA Windows software
    • Multi-head operation
    • Field-replaceable electron multiplier and filament
    • RGA and CIS mode
    Learn More

    View

  7. SRS CIS300 Closed Ion Source Gas Analyser

    SRS CIS300 Closed Ion Source Gas Analyser

    • 100, 200, and 300 amu systems
    • 1 ppm detection
    • 10 mTorr max. operating pressure
    • 1 x 10-12 Torr detection limit
    • Real-time RGA Windows software
    • Multi-head operation
    • Field-replaceable electron multiplier and filament
    • RGA and CIS mode
    Learn More

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  8. SRS RGA Ethernet Adapter

    SRS RGA Ethernet Adapter

    • Connect to your SRS RGA via Ethernet LAN
    • Works with existing RGA and QMS systems
    • Easy to install
    • Control multiple RGA units from one computer
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