Characterisation, Measurement & Analysis
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Fischione Model 1062 TrionMill

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  • Fischione Model 1062 TrionMill

Fischione Model 1062 TrionMill

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Product Code: Model1062
Manufacturer: Fischione

Fischione Instruments’ Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses. The TrionMill’s three ion sources provide large-scale milling of planar and cross-section samples. High-energy operation allows rapid milling of large areas (up to 50 mm); low-energy operation allows gentle sample polishing.



  • Three independently adjustable TrueFocus ion sources 

  • Planar sample sizes up to 50 mm diameter by 25 mm height 

  • Controllable beam diameter over a wide range of operating energies (100 eV to 10 keV)

  • Liquid nitrogen-cooled sample stage (optional)

  • Vacuum/inert gas/cryogenic transfer system protects environmentally sensitive samples (optional)

  • Remote operation

Advanced sample preparation

Fischione Instruments’ Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses.

The TrionMill’s three ion sources provide large-scale milling of planar and cross-section samples. High-energy operation allows rapid milling of large areas (up to 50 mm); low-energy operation allows gentle sample polishing.

Accepts large sample sizes

The TrionMill creates the largest and most uniform flat area achievable by ion milling. The instrument accepts the following sample sizes:

  • Planar: Up to 50 mm diameter x 25 mm height [1.968 x 0.787 in.]

  • Cross section: Maximum: 10 x 10 x 4 mm [0.39 x 0.39 x 0.157 in.]

Cross-section station (optional)

The Fischione Instruments’ Cross-section station is a tool for creating pristine cross-section samples ready for ion milling in the SEM Mill. 

Quick sample transfer

The front-loading load lock with pneumatic vacuum gate valve enables high sample throughput. The bayonet sample holder’s quick release functionality speeds sample transfer. The sample transfer rod folds out of the way when not in use.  

Precise angle adjustment

The ion sources are tilted to provide the desired milling angle. The continuously adjustable ion source tilt angles range from 0 to +10°. You may choose to use one, two, or three of the TrueFocus ion sources. Each ion source beam angle moves in unison.

Automated milling angle adjustment
Automated milling angle adjustment using the touch screen enables you to create multi-step milling sequences that include the automatic adjustment of milling angles throughout the milling process.

Programmable sample motion

Sample rotation is 360° continuous rotation with variable rotation speed and a sample rocking feature. Automatic height detection establishes the milling plane, which yields repeatable results.

Integrated stage cooling (optional)

The TrionMill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked. The dewar is positioned near the operator for easy access. Temperature is continuously displayed on the touch screen. The stage cooling functionality provides up to 18 hours of cryo conditions. 

Programmable temperature

The TrionMill offers the ability to program and maintain a specific temperature between ambient and cryogenic.

At the conclusion of milling at cryogenic temperatures, the stage temperature is automatically increased to ambient before venting to avoid sample frost and contamination. A thermal safeguard can be programmed to a specific stage temperature threshold at which the ion sources will be deactivated if the liquid nitrogen in the dewar becomes depleted.

Vacuum/inert gas/cryogenic transfer system (optional)

This system allows for the direct transfer of a sample at vacuum, in inert gas, or at a cryogenic temperature to SEM or FIB. The system uses active pumping to maintain high vacuum during transfer. The transfer system is a collaboration with Quorum Technologies Ltd.

Sample viewing (optional)

The ion milling process can be monitored in situ in the milling position when using either of the optional high-magnification microscopes. 

  • High-magnification (525X) microscope

  • High-magnification (1,960X) microscope 

The viewing window is protected by a shutter, which prevents buildup of sputtered material that can interfere with sample observation. 

Sample image acquisition (optional)

The sample image acquisition option employs a CMOS (complementary metal oxide semiconductor) camera and monitor to view samples and capture images in situ during milling. This system is useful for monitoring the delayering process. 

Automatic termination

The ion milling process can be automatically terminated by elapsed time or by temperature. 

Remote diagnostics 

Fischione Instruments is committed to support maximum instrument uptime. To that end, the TrionMill has the capability of remote diagnostics. When connected to the Internet, the TrionMill can be accessed by Fischione Instruments Service for rapid troubleshooting and diagnostics support.

Advanced sample preparation

Fischione Instruments’ Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses.

The TrionMill’s three ion sources provide large-scale milling of planar and cross-section samples. High-energy operation allows rapid milling of large areas (up to 50 mm); low-energy operation allows gentle sample polishing.

Accepts large sample sizes

The TrionMill creates the largest and most uniform flat area achievable by ion milling. The instrument accepts the following sample sizes:

  • Planar: Up to 50 mm diameter x 25 mm height [1.968 x 0.787 in.]

  • Cross section: Maximum: 10 x 10 x 4 mm [0.39 x 0.39 x 0.157 in.]

Cross-section station (optional)

The Fischione Instruments’ Cross-section station is a tool for creating pristine cross-section samples ready for ion milling in the SEM Mill. 

Quick sample transfer

The front-loading load lock with pneumatic vacuum gate valve enables high sample throughput. The bayonet sample holder’s quick release functionality speeds sample transfer. The sample transfer rod folds out of the way when not in use.  

Precise angle adjustment

The ion sources are tilted to provide the desired milling angle. The continuously adjustable ion source tilt angles range from 0 to +10°. You may choose to use one, two, or three of the TrueFocus ion sources. Each ion source beam angle moves in unison.

Automated milling angle adjustment
Automated milling angle adjustment using the touch screen enables you to create multi-step milling sequences that include the automatic adjustment of milling angles throughout the milling process.

Programmable sample motion

Sample rotation is 360° continuous rotation with variable rotation speed and a sample rocking feature. Automatic height detection establishes the milling plane, which yields repeatable results.

Integrated stage cooling (optional)

The TrionMill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked. The dewar is positioned near the operator for easy access. Temperature is continuously displayed on the touch screen. The stage cooling functionality provides up to 18 hours of cryo conditions. 

Programmable temperature

The TrionMill offers the ability to program and maintain a specific temperature between ambient and cryogenic.

At the conclusion of milling at cryogenic temperatures, the stage temperature is automatically increased to ambient before venting to avoid sample frost and contamination. A thermal safeguard can be programmed to a specific stage temperature threshold at which the ion sources will be deactivated if the liquid nitrogen in the dewar becomes depleted.

Vacuum/inert gas/cryogenic transfer system (optional)

This system allows for the direct transfer of a sample at vacuum, in inert gas, or at a cryogenic temperature to SEM or FIB. The system uses active pumping to maintain high vacuum during transfer. The transfer system is a collaboration with Quorum Technologies Ltd.

Sample viewing (optional)

The ion milling process can be monitored in situ in the milling position when using either of the optional high-magnification microscopes. 

  • High-magnification (525X) microscope

  • High-magnification (1,960X) microscope 

The viewing window is protected by a shutter, which prevents buildup of sputtered material that can interfere with sample observation. 

Sample image acquisition (optional)

The sample image acquisition option employs a CMOS (complementary metal oxide semiconductor) camera and monitor to view samples and capture images in situ during milling. This system is useful for monitoring the delayering process. 

Automatic termination

The ion milling process can be automatically terminated by elapsed time or by temperature. 

Remote diagnostics 

Fischione Instruments is committed to support maximum instrument uptime. To that end, the TrionMill has the capability of remote diagnostics. When connected to the Internet, the TrionMill can be accessed by Fischione Instruments Service for rapid troubleshooting and diagnostics support.

Additional Information

Model 1062 TrionMill Specifications

Ion sources

Three TrueFocus ion sources
Variable energy (100 eV to 10.0 keV) operation
Beam current density up to 10 mA/cm2
Milling angle range of 0 to +10˚
Choice of single, double, or triple ion source operation
Motorised ion source angle adjustment
Independent ion source energy control
Adjustable spot size (300 μm to 5 mm)
Faraday cups for the direct measurement of beam current from each ion source; allows optimisation and adjustment of the ion source parameters for specific applications
Milling rates in excess of 500 μm/hour
Low ion source maintenance

Load lock

Front-loading load lock for high sample throughput
Pneumatic vacuum gate valve
Bayonet sample holder capture with quick release functionality
Sample transfer rod folds out of the way when not in use

User interface

Instrument operation controlled via 10-inch, ergonomically adjustable touch screen

Automatic termination

Automatic termination by time or temperature

Sample stage

Offers both planar and cross-section milling capabilities:
• Planar Up to 50 mm diameter x 25 mm height [1.968 x 0.787 in.]
• Cross section Maximum: 10 x 10 x 4 mm [0.39 x 0.39 x 0.157 in.]
Automatic height detection establishes the milling plane, which yields repeatable results
360˚ sample rotation or rocking motion with variable speed

Sample cooling (optional)

Liquid nitrogen conductive cooling with integral dewar and automatic temperature interlocks
Dewar access positioned close to instrument operator
Ability to program and maintain a specific temperature between ambient and cryogenic
Provides up to 18 hours of cryo conditions
Offers cryo protection capability, which automatically stops milling operations if the stage temperature rises above a user-selected temperature threshold

Cross-section station (optional)

Produces pristine cross-section samples
Allows precise positioning of the area of interest: x, y, and θ
Effective for use with a wide variety of materials, including semiconductor devices, multilayers, ceramics, polymers, and hard/brittle materials
Prepared region of interest is flat and free from damage for subsequent SEM imaging and analysis
Accommodates a wide range of sample and mask sizes:
• Sample and mask align both laterally and angularly
• Multiple uses from a single mask

Vacuum/inert gas/cryogenic transfer system (optional)

Allows direct transfer of a sample at vacuum, in inert gas, or at a cryogenic temperature to a SEM or FIB
Uses active pumping to maintain high vacuum
A collaboration with Quorum Technologies Ltd.

Sample viewing (optional)

Sample can be monitored in situ in the milling position when using the high-magnification microscope
Microscope options:
• 525X high-magnification microscope
• 1,960X high-magnification microscope
Viewing window is protected by a programmable shutter that prevents buildup of sputtered material and preserves the ability to observe the sample in situ

Sample image acquisition (optional)

CMOS (complementary metal oxide semiconductor) camera for image acquisition and display
Useful for monitoring the delayering process Image acquisition system includes:
• CMOS camera
• Secondary monitor
• Imaging computer
• Keyboard
• Mouse
Images can be saved to the imaging computer or transferred to another computer

Remote operation (optional)

Enables operation of multiple milling tasks from a remote computer, including:
• Recipe programming
• Start, pause, stop, and restart
• Sample viewing
• Sample image acquisition
• Operating parameters monitoring
• Service diagnostics

Stack light indicator (optional)

Allows the determination of milling operation status from a distance

Sample illumination

Both high-magnification microscopes have light sources that provide top-down, user adjustable, reflected sample illumination

Process gas

Argon (99.995%) or better; nominal 15 psi delivery pressure required
Automatic gas control using three mass flow controllers

Vacuum system

Turbomolecular drag pump and an oil-free, multi-stage diaphragm pump
Vacuum sensing with a cold cathode, full-range gauge

Enclosure

Width: 76 cm [29.73 in.]
Height:
• Touch screen: 66 cm [26 in.]
• High-magnification microscope: 88 cm [34.35 in.]
Depth:
• Sample transfer rod folded: 65 cm [25.25 in.]
• Sample transfer rod extended: 98 cm [38.61 in.]
Enclosure design offers easy access to internal components

Power

100/120/220/240 VAC, 50/60 Hz, 720 W

Warranty

One year

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