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TMC SEM-Base VI Piezoelectric Vibration Cancellation Platform

Product Code:
SEMBaseVI
Manufacturer: TMC
  • Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
  • Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 
  • Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

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SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer. 

SEM-Base VI uses a unique "serial architecture" in which the vibration sensors measure floor vibration, not payload vibration. This ensures that, unlike other designs, payload resonances do not inherently limit vibration isolation or cause instability. The vibration sensors are low frequency inertial velocity sensors for maximum sensitivity in the difficult to measure sub-Hz range. Combined with our unique piezo-actuator technology, SEM-Base VI achieves extremely high levels of vibration cancellation, even on already quiet floors. 

SEM-Base VI provides, on average, 6 dB more vibration isolation than previous models. In addition, TMC's next generation controller, the DC-2020, features a new dual-core processor and provides tool owners and researchers with a very simple and easy-to-use graphical interface for fast system assessment and operational peace-of-mind. When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser with no additional software or application program to install. Alternatively, the user can interface with the controller via an on-board menu-driven Liquid Crystal Display (LCD). 


NOTE: See SEM-Closure, a total environmental solution designed specifically to protect SEMs. It can accommodate SEM-Base and Mag-NetX®  in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.

Performance Specifications

Active degrees of freedom 6
Active bandwidth 0.6 Hz - 100 Hz
Passive natural frequency 12 Hz nominal
Effective active resonant frequency 0.5 Hz
Isolation at 1 Hz 40% - 70%
Isolation at 2 Hz 90%
Isolation at ≥3 Hz 90-98%
Internal noise <0.1 nm RMS
Operating load range Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)
Magnetic field emitted
at maximum 4 in.(102 mm)
from the platform
<0.02 μG broadband RMS

Design, Dimensions, and Environmental and Utility Requirements

Environmental and safety CE and RoHS compliant
Active isolation elements Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
Passive isolation element single stiff elastomer (no compressed air supply required)
Vibration sensor elements downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface
Dimensions (WxD) 35.25 x 44.25 in.
895 x 1124 mm
Height 6.3 in. (160 mm) nominal,
doesn't change when SEM-Base is switched off
Operating temperature 50° - 90° F
10° - 32° C
Storage temperature -40° - 130° F
-40° - 55° C
Humidity < 80% @ 68° F | 20° C, Maximum dewpoint 18 degrees C
System power requirements 100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Floor displacement <800 μin. (20 μm) below 10 Hz

Controller Specifications

Processor 150/75 MHz dual core
Sampling rate 10 kHz
Analog outputs 16 channels
Analog inputs 16 channels
Status light single LED
Front panel ports 1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
User interface Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI

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