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TMC SEM-Closure Acoustic Enclosure

Product Code:
SEMClosure
Manufacturer: TMC
  • Main Door – 36" wide allowing full access to front of SEM. 24" side module also includes a door on front side. Several hinged doors allow easy access to any side of the SEM for sample preparation, adjustment of accessories and maintenance. Bi-fold doors on sides and rear help minimize clearance requirements. Optional quarter-panel door for quick and easy access. Model shown is number 30-202-12-24
  • Top Panel – Includes easy-open space-saving hatch door for access to top of SEM. Cam-Lock ensures tight seal.
  • Latches – All doors include easy-to-open latches, and tight seal when closed. All panels constructed of TMC proprietary acoustic layering with powder coated steel exterior.

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SEM-Closure™ is an acoustic enclosure designed specifically for scanning electron microscopes (SEMs). Together with TMC's SEM-Base™ floor platform and Mag-NetX™ magnetic field cancellation, SEM-Closure™ provides a total environmental solution to protect sensitive SEMs from all outside interference. 

SEM-Closure is designed to accommodate SEM-Base, an active piezoelectric vibration cancellation floor platform, and Mag-NetX in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.  

Integration of the three systems ensures proper fit and compatibility. The vibration isolation system can be inside the enclosure itself. Also, the SEM-Closure frame is designed to accommodate Mag-NetX Helmholtz coils as well as the acoustic panels, eliminating the need for a second frame to house the coils. SEM-Closure provides multiple access points, a heat dissipation system, and provisions for tool plumbing and cabling within the system.

Achieve the high resolution and control your microscope was intended for, don't let your environment limit the return on your TEM investment

With their extremely high magnifications and resolving power, electron microscopes, both scanning and transmission type, as well as focused ion-beam instruments, can be greatly impacted by their environment. Beam control in these instruments is critical for the highest quality images at high magnifications. Although high power beam instruments are engineered and manufactured to very high standards, their performance is impacted by less than ideal environments. Low frequency floor vibration can limit your resolving power. High AC magnetic fields, or fluctuations in the DC fields can result in unwanted jagged edges in images. Acoustic sound waves can excite a resonance mode in the beam column and further disrupt the control of the beam and spot size, also leading to lower resolving power. All of these environmental problems can slow your research, impact throughput in a production environment, and even lead to very undesirable downtime for the microscope.

 

System

System components 3-axes orthogonal magnetic sensor, Mag-NetX controller, Helmholtz type coil pairs in cage, enclosure-mounted or wall-mounted configuration
Active magnetic field cancellation axes X, Y, Z
Sensor type Fluxgate type, noise <10 pT/√Hz @ 1 Hz
Max. ambient DC field (sensor dependent) ±70 µT standard
up to ±250 µT available
Bandwidth (cage and sensor dependent) DC to 1 kHz typical, up to 2 kHz
Dynamic range (cage and frequency dependent) ±10 µT typ., up to ±100 µT
40 dB typ., 55 dB max.
Controlling volume vs. magnetic field flux density 50 m3 @ 10 µT RMS (depending on cage parameters)
1 m3 @ 50 µT RMS (standard controller is able to cancel Earth magnetic field with special cage construction)
10 m3 @ 50 µT RMS (for canceling Earth’s field in larger volume with special cage and external amplifier)
Field reduction ratio at sensor location
using typical cage of 36 x 36 x 52 in. /
91 x 91 x 132 cm (L x W x H);
40 - 50 dB (100x - 300x) typ. in DC 100 Hz
26 dB (20x) typ. in 100-500 Hz
Field reduction ratio in a typical electron
microscope column volume of
12 x 12 x 24 in. / 30 x 30 x 60 cm
using cage of 60 x 60 x 84 in. /
1152 x 152 x 213 cm (L x W x H)
X, Y: 30 dB (32x) typ. in DC 100 Hz
X, Y: 20 dB (10x) typ. in 100-500 Hz
Z: 15 dB (5.2x) typ. in DC 100 Hz
Z: 10 dB (3x) typ in 100-500 Hz
0 dB @ 1000 Hz

Controller

Dimensions 17 x 9 x 1.75 in. / 43 x 23 x 4.5 cm
Operational modes After power-on:
  • Automatic self test/calibration and switch to controlled mode in 1 min. No user involvement required.
  • Manual test/debug mode
  • True DC mode (compensating Earth magnetic field)
  • Offset-DC mode (ignoring Earth magnetic field
  • Track DC-shift due to microscope moving parts
  • Quasi-DC mode (ignoring >100 sec. fluctuations)
  • Cancel-and-create (simultaneously cancelling disturbance and creating custom field)
Types of control tools
  • Analog feedback with digitally controlled gain, DC - 2 kHz
  • Digital feedback
  • Digital feedforward (cancels AC-line power frequency and harmonics without gain-stability limits of feedback)
OK LED indicator green=ok; yellow=warning/error
LCD 2x20 symbol display Show menu and status
Bar-LED indicators Show XYZ real time strength of compensation field
4 directional buttons for LCD menu navigation
USB socket (appears as COM port on PC) Graphical user interface for advanced tuning/testing, accepts ASCII commands and shows menu
Aux. analog inputs (rear DB-37) Can be used as feedforward or to create custom field
GO - NO GO signal relay Binary, for use as input for protected system
Power requirements 90-240 VAC, 50/60 Hz, 500 VA max.
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