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Phenom XL

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Phenom XL Desktop SEM for Large Samples

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Product Code: PW-100-018
Manufacturer: Thermo Fisher Scientific

The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system. Next to this, it is equipped with a chamber that allows analysis of large samples up to 100mm x 100mm. The XL allows for in-situ testing with a tensile and compression holder up to 150N or 1000N. Optional eucentric and compucentric stage and vibration isolation platform only for the XL.

The Phenom XL has the largest sample stage of any tabletop SEM while maintaining all of the advantages of the original Phenom platform. The Phenom XL has a Large sample chamber which can accomidate samples up to 100mm by 100mm by 65mm. 

  • Benchtop SEM - Small footprint
  • Fast vent/load cycle for high throughput
  • Motorized XY stage
  • Color optical camera for single-click navigation
  • Elemental analysis with EDS option
  • Secondary electron detector option
  • No infrastructure needed
  • All-in-one imaging and analysis system (BSE, SE -optional and EDS)
  • Scan area up to 100 mm x 100 mm
  • Elemental analysis is as easy as imaging, with fully integrated EDS
  • Variable vacuum (high, medium & low) modes for all samples types. Low Vac eliminates the need for sputter coating.
  • Permanent optical overview for swift navigation to any region on the sample
  • Multiple acceleration voltages. Pre-set 5, 10 & 15 kV and an adjustable range between 4.8 and 20.5kV.

The Phenom Application System and Pro Suite are available for any Phenom desktop SEM. The Phenom Application System can be connected directly via local a network or the Internet, enabling network storage and remote system control.

Additional Information

 

IMAGING SPECIFICATIONS  
Imaging Modes  
Light Optical Magnification range: 3 - 16x
Electron Optical Magnification range: 80 - 100,000x / Digital zoom max.12x
   
Illumination  
Light Optical Bright field/dark field modes
Electron Optical

Long-lifetime thermionic source (CeB6)
Multiple beam currents

Acceleration Voltages  Default: 5 kV, 10 kV and 15 kV
  Advanced mode: adjustable range between 4,8 kV and 20.5 kV imaging and analysis mode
Vacuum Levels Low - medium - high
Resolution  ≤ 14 nm
Detector  
Standard BackScatter Detector
Optional Secondary Electron Detector
Digital Image Detection  
Light Optical Propriety high resolution colour navigation camera, single shot
Electron Optical
 
High Sensitivity Backscatter Electron Detector (Compositional and Topographical modes)
   
Image Format JPEG, TIFF, BMP
Image Resolution Options

456x456, 684x684, 1024x1024 and 2048x2048 pixels

Data Storage

USB flash drive, Network, Pro Suite PC

Sample Stage Computer controlled motorised X and Y
Sample Size max 100mm x 100mm (up to 36 x 12 mm pin stubs)
Scan Area max 50mm x 50mm, 100mm x 100mm (optional)
Sample Loading Time  
Light Optical <5s
Electron Optical <60s
EDS SPECIFICATIONS  
Detector Type

Silicon Drift Detector (SDD)

Thermoelectrically cooled (LN2) free

Detector Active Area   25mm2
X-ray Window  Ultra-thin Silicon Nitride (Si3N4) window allowing detection of elements B to Am
Energy resolution

Mn Kα  < 137 eV

Processing capabilities  Multi-channel analyser with 2048 channels at 10 eV/ch
Max. input count rate 300,000 cps
Hardware integration  Fully embedded
SOFTWARE                 

Integrated in Phenom ProSuite

Integrated column and stage control

Auto-peak ID

Iterative strip peak deconvolution

Confidence of analysis indicator

Export functions:  CSV, JPG, TIFF, ELID, EMSA
REPORT Docx format
SYSTEM SPECIFICATIONS  
DIMENSIONS & WEIGHT  
      Imaging module 316(w) x 587(d) x 625(h) mm, 75 kg
      Diaphragm vacuum pump 145(w) x 220(d) x 213(h)mm,4.5kg
      Power supply 156(w) x 300(d) x 74(h) mm, 3 kg
      Monitor 375(w) x 203(d) x 395(h) mm, 7.9 kg
      Pro Suite

Standard Pro Suite System including: 

19” monitor with PC and network router mounted

375(w) x 250(d) x 395(h) mm, 9 kg

REQUIREMENTS  
AMBIENT CONDITIONS  
      Temperature 15°C ~ 30°C (59°F ~ 86°F)
      Humidity < 80% RH
      Power

Single phase AC 110 - 240 Volt, 50/60 Hz, 300 W (max.)

RECOMMENDED  
TABLE SIZE 150 x 75 cm, load rating of 100kg 
   

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