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Phenom ProX Desktop SEM

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  • Phenom ProX Desktop SEM

Phenom ProX Desktop SEM

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Product Code: PW-100-517
Manufacturer: Thermo Fisher Scientific

The Phenom ProX is a complete desktop analysis tool, offering 150,000x magnification and easy to use EDS X-ray analysis. Although powerful, it also retains the super-fast load times and innovative user interface to produce high-quality electron microscope images with minimal training. Now with the option for secondary electron imaging.

  • 150,000x magnification, ≤10 nm resolution (BSE), ≤8 nm resolution (SE). 

  • Integrated EDS system for X-ray Elemental Analysis

  • Range of in-situ holders for SEM analysis (electrical feedthrough and temperature)

  • 30 second load time

  • Charge reduction mode

The Phenom ProX tabletop scanning electron microscope (SEM) is the ultimate all-in-one  imaging and analysis system. The ProX is designed to analyse samples' structures and their elemental composition. The optional Elemental Mapping and Line Scan software allows further analysis of the distribution of elements. The innovative design of the Phenoms provides a list of advantages over every other desktop SEM:

  • The Phenom desktop SEM is the fastest SEM on the market. Only 30 seconds sample loading to electron imaging.
  • The high brightness Cerium Hexaboride (CeB6) source is 10x brighter than tungsten sources resulting in better image resolution at lower accelerating voltages on any sample.
  • Multiple acceleration voltages, 4.8kV to 15kV.
  • 20kV option for better EDS analysis
  • Colour optical camera for single-click navigation
  • Charge reduction mode reduces need to coat samples
  • Elemental analysis with EDS option
  • Secondary electron detector option
  • Benchtop SEM - Small footprint
  • No vibration isolation platform, liquid nitrogen or gas supplies are needed.
  • All service is covered by one contract. 
  • Remote Assistant

The Phenom Application System and Pro Suite are available for any Phenom desktop SEM. The Phenom Application System can be connected directly via local a network or the Internet, enabling network storage and remote system control.


Additional Information




Imaging module with built-in thermo-electrically cooled Silicon Drift Detector (SDD), 19" monitor, Rotary knob, diaphragm vacuum pump, power supply, USB 2.0 flash drive, Pro Suite PC with 19" monitor, keyboard & mouse
Thermo-electrically cooled (LN2 free) Silicon Drift Detector (SDD)
Detector active area 25 mm2
X-ray window
Ultra-thin Silicon Nitride (Si3N4) window
Energy resolution Mn Kα  ≤132 eV
X-ray processing capabilities Multi-channel analyzer with 2048 channels at 10 eV/ch
Max. input count rate: 300,000 counts per second
Hardware integration Fully embedded

Integrated in Phenom Pro Suite 
Integrated column and stage control
Auto-peak ID 
Iterative strip peak deconvolution 
Confidence of analysis indicator 
Advanced point & click element identification, confirmation and verification mode 
Confidence of analysis indicator

Imaging Modes  
Light Optical Magnification: 20x to 135x
Electron Optical

Magnification range: 80x to 150,000x

Digital zoom max. 12x

Light Optical Bright field/dark field modes
Electron Optical

Long lifetime thermionic (CeB6) source

Low, imaging, spot analysis and mapping mode, beam currents selection

 - Accelerating voltages

Default: 5, 10 & 15 kV

Advanced mode: adjustable range between 4.8kV and 15 kV imaging and analysis modes

- Resolution ≤10nm (BSED), ≤8nm (SED)
 Detector  Backscattered electron detector (standard), Secondary electron detector (optional)
Digital Image Detection  
Light Optical Colour navigation camera
Electron Optical
High sensitivity backscatter electron detector (compositional and topographical modes)
Image Format JPEG, TIFF, BMP
Image Resolution 456x456, 684x684, 1024x1024 and 2048x2048 pixels
Data Storage

USB 2.0 Flash drive


ProSuite PC

Sample Stage Computer controlled motorised X and Y
Sample Size up to 32 mm (dia) x up to 100mm (h)
Sample Loading Time  
Light Optical <5s
Electron Optical <30s
Dimensions & Weight  
Imaging module 286(w) x 566(d) x 495(h)mm, 50kg
Diaphragm vacuum pump 145(w) x 220(d) x 213(h)mm, 4.5kg
Power supply 156(w) x 300(d) x 74(h)mm, 3kg
Monitor 375(w) x 203(d) x 395(h) mm, 7.9kg
Temperature 15°C ~ 30°C (59°F ~ 86°F)
Humidity <80%RH
Power Single phase AC 110 - 240Volt, 50/60Hz, 300W (max.)
Recommended Table 150 x 75cm, load rating of 100kg

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