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Zygo VeriFire MST Interferometer

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Product Code: Zygo VeriFire MST
Manufacturer: Zygo
The Zygo VeriFire MST utilises a wavelength shifting laser and patented data acquisition methods to enable simultaneous measurement of the front and back surface of transparent optics, thickness variation (including wedge) and simple 2-step homogeneity metrology without difficult part preparation or messy coatings.

Optical Flat Testing New Technology from Zygo

Front & Back Surface, Thickness & Homogeneity results in seconds

The Zygo VeriFire MST™ provides results and measurement capabilities never before available. The VeriFire MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that only confuse standard Phase Shift Interferometry algorithms.

Zygo has solved this problem using wavelength shifting of phase, and ZYGO's new Fourier Transform Phase Shifting Interferometry (FTPSI). The VeriFire MST can now measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within MetroPro™ software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.

Three-Surface Interferometry

Plane parallel plates can now be measured for the flatness of the front and back surface (1) plus the optical thickness of the plate. In one data acquisition you can measure the front surface map, optical thickness variation, and the back surface approximation using optical thickness information.

Four Surface Interferometry

This technique enables the measurement of all of the following with only two data acquisitions (and no hazardous part coatings):

  • Front and Back surface maps 
  • Physical Thickness Variation (including Wedge) 
  • Optical Thickness Variation 
  • Refractive Index Variation:
    • Nonlinear Homogeneity
    • Linear Homogeneity (first time!)


Note: Back surface assumes a constant index approximation. Four Surface Interferometry eliminates the need for this assumption.

 

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