Flat Panel Application DMI System

Applications for processing LCD substrates can involve large beam paths and stage tilt, introducing large beam shear. A combination of the ZMI 7714 laser with an 8 mm beam diameter and ZMI 4004 measurement boards provides a robust solution for large beam shear applications.

ZMI 4000 series measurement boards require a VME64x chassis, which ZYGO does not supply.