Home Gas Sampling & Analysis Systems SRS UGA200* Universal Gas Analyser

SRS UGA200* Universal Gas Analyser

Product Code:
19062
Manufacturer: Stanford Research Systems
  • Operates from atmospheric pressure to UHV
  • 100, 200 and 300 amu systems
  • Fast response time (<0.2 s="" li="">
  • Electron multiplier standard on all systems
  • Stand-alone leak detection
  • Built-in heaters for bakeout to 120 °C
  • Windows software (uses RS-232 or Ethernet)
  • Operates in highly corrosive environments
  • Turbo pump venting (opt.)
  • Multi-capillary inlet (opt.)

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The Stanford Research Systems UGA Series Universal Gas Analysers are state-of-the-art bench top mass spectrometers that operate from above atmospheric pressure to UHV. They are ideal for on-line monitoring and analysis of gas mixtures. Whether you’re measuring trace-level contaminants, solvents, hydrocarbons, refrigerants or corrosive gases, your SRS UGA analyser is up to the task.

UGA applications include semiconductor exhaust gas monitoring, glove box analysis, fuel cell studies, Freon detection, pollution monitoring, fermentation studies and general R&D vacuum analysis.

These analysers are also simple to operate and maintain. The chassis design allows the instrument to be operated vertically or horizontally, and both front-panel and computer operation are supported.

Principle of operation

The UGA system uses a two-stage pressure reducing inlet to sample gases at atmospheric pressure. After the pressure is reduced to around 10-6 Torr, the gas stream is sent to a mass spectrometer (residual gas analyser - RGA) which measures the concentration of each mass of interest.

The UGA Windows software provides a graphical user interface for complex graphing and data analysis. The software also allows remote control of the system’s valves, heaters and pumps.

For gas sampling in the range of 10-1 to 10-4 Torr, the vacuum inlet assembly is used. Simply attach a 2 ¾” CF to ¼” tube adapter to one of the CF ports, and adjust the length of the tube for the inlet pressure.

Direct access to the RGA is provided for UHV applications (<10-4 torr="" any="" of="" the="" 2="" cf="" ports="" vacuum="" inlet="" assembly="" can="" be="" used="" to="" connect="" your="" chamber="" p="">

Multi-capillary inlet

An optional multi-port sampling inlet consists of 16 manifold-mounted valves that can be used with a variety of capillaries.

Heated chamber

The UGA system is equipped with individual heaters for the vacuum chamber (including RGA), the turbo pump connector, and the vacuum inlet assembly. During bakeout, the system can be heated to 120 °C.

Dual-diaphragm pumps

Separate diaphragm pumps are used to handle the bypass flow and backing of the turbo pump. This architecture allows corrosive gases (chlorine, fluorine, etc.) to be analysed without damaging the RGA and turbo pump, and virtually eliminates the problem of back streaming. Measuring high concentrations of low mass gases (hydrogen, helium, etc.) is no longer a problem.

Turbo pump venting

An optional valve and inlet to the turbo pump’s exhaust is available for users who wish to vent with dry nitrogen (or other inert gases). This keeps the pump free from water and other contaminants present in air.

Using your UGA

The UGA system can be controlled from the front-panel or from a computer. A choice of manual or auto-control of all system components is provided.

Data is measured and displayed using the UGA software. The intuitive user interface allows measurements to be made quickly and easily. Data is captured and displayed in real-time, or scheduled for acquisition at a specified time.

Features include analog and histogram scan modes, pressure vs. time plots, leak detection, gas library, and on-line help.

RGA parameters can also be controlled and monitored through a high-level ASCII command set. Standard RS-232 and Ethernet interfaces are used as the data link to your PC.

Best value

The UGA Analysers offer the best value of any system currently available. They provide more performance, better features, and are priced well below the competition.

Inlet
Type
1 to 760 Torr Stainless steel and PEEK capillaries
10-1 to 10-4 Torr 1/8" to 1/4" tubing
<10-4 torr="" td=""> 2-3/4" CF flange
Flowrate 1 to 10 milliliter per minute at atmospheric pressure
Mass Spectrometer
Type Quadrupole (RGA)
Detector Faraday cup and electron multiplier
Range 100, 200 or 300 atomic mass units (amu)
Resolution Better than 0.5 amu at 10 % of peak height
Detection limit Less than 1 ppm
Operating pressure 5 × 10-6 mbar 
 
Connections
Inlet
1 to 760 Torr 1/8" Ultra-Torr® fitting
10-1 to 10-4 Torr 2-3/4" CF flange with swagelok connection
<10-4 torr="" td=""> 2-3/4" CF flange
Computer interface RS-232, Ethernet 
 
UGA software
Software Windows application. Controls UGA system including RGA.
System
High-vacuum pump Hybrid turbo-molecular
Diaphragm pump Advanced low pressure
Materials
Construction SS304 and SS316
Insulators Alumina, ceramic
Seals Viton®, buna-N, and nitrile butyl rubber, copper gasket
Miscellaneous Aluminum, Tygon®
General
Startup time 8 minutes from full stop
Max. ambient temp. 35 °C
Bakeout temp. 120 °C (regulated heaters)
Power requirement 720 W, 85 to 264 VAC or 120 to 370 VDC, 47 to 63 Hz
Dimensions 12 " × 11 " × 27 " (WHL)
Weight 85 lbs.
Warranty 
 
One year parts and labor on defects in material or workmanship.
Pump seals and diaphragm warranted for 90 days.

 

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