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TMC STACIS 4 Piezoelectric Active Vibration Cancellation

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Manufacturer: TMC

STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The STACIS 4 builds upon the success of TMC's proven STACIS technology, which is used by 9 of the top 10 semiconductor manufacturers worldwide.

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Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to applications such as, failure analysis, nanotechnology research, nanofabrication, structural biology, and materials research.

STACIS 4 includes a new and improved, lower noise, digital controller, the DC-2020 with a dual-core processor . This new advanced control system provides the user with an easy to use Graphical User Interface (GUI).

STACIS 4 builds on the advanced architecture of previous generations by adding advanced control algorithms and new patented technology. The results are previously unachievable vibration cancellation of building floor vibration at all frequencies, but particularly below 10Hz, where high resolution imaging and metrology is most sensitive. When combined with patented FloorSense™ technology, STACIS 4 reduces building floor vibration by 60 dB at 2 Hz and 27dB at 1Hz. Full performance specifications for STACIS 4 are included below.

Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

The unique serial design and proprietary high-force piezoelectric technology 
results in a wide active bandwidth from 0.2 Hz to 150 Hz and unmatched active isolation with up to 99.9% vibration reduction at 2Hz

Even greater vibration control than STACIS III
STACIS 4 improves vibration control at 2 Hz by up to 60 dB over the industry standard solution.

Robust serial design allows you to set it and forget it, unlike competitive parallel designs that are inherently unstable and need frequent tuning to maintain peak performance. In addition STACIS 4 allows for two stage vibration control designs incorporating passive or active parallel platforms on top of the STACIS system. Two stage designs are becoming more common as instruments are forced to finer resolutions. 

STACIS 4 performance is the equivalent of reducing your vibration environment by up to 5 VC curves on a stable floor. In addition this performance gives users the flexibility to install instruments in less than ideal vibration environments, allowing more flexibility in facility layout and design.


Performance Specifications

Active degrees of freedom 6
Active bandwidth 0.2 Hz - 150 Hz
Isolation at 1 Hz 85% - 96%
Isolation at 2 Hz 96-99.9%
Settling time (typical) 0.02 sec
Internal noise <0.05 nm RMS
Operating load range per isolator Low capacity: 400-1100 lbs (182-500 kg)
Med capacity: 900-2100 lbs (410-955 kg)
Hi capacity: 1900-4500 lbs (864-2045 kg)
Stiffness (1000 lb / 454 kg mass, Med capacity isolator) 40,000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator <0.02 μG broadband RMS

Isolator Design, Dimensions, and Environmental and Utility Requirements

Environmental and safety CE and RoHS compliant, designed to comply with NRTL safety certification standards
Active isolation elements Piezoelectric elements are actuated by a high-voltage amplifier. Vertical actuators support the isolated payload.
Passive isolation element Single isotropic hard-mount elastomer (no compressed air supply required)
Vibration sensor elements Geophone type inertial sensors measure floor vibration and deliver a signal to the control system proportional to the velocity of vibration motion
Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH) 11.75 x 12.5 x 10.8 in.
300 x 320 x 275 mm
Isolator weight 75 lb (34 kg)
Operating temperature 50° - 90° F
10° - 32° C
Storage temperature -40° - 130° F
-40° - 55° C
Humidity 80% Maximum at 68 degrees F (20 degrees C), Maximum dewpoint: 18 degrees C
System power requirements 100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Isolator count per system minimum of 3, no maximum
Options laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods

DC-2020 Controller Specifications

Dimensions (WxDxH) 19 x 8.5 x 1.75 in.
483 x 216 x 45 mm
Weight 6.3 lb (2.9 kg)
Processor 150/75 MHz dual core
Sampling rate 10 kHz
Analog outputs 16 channels
Analog inputs 16 channels
Status light single LED
Front panel ports 1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
Rear panel ports 1x serial USB 2.0
1x Ethernet RJ-45
1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interface Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI
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