Home Discontinued Optical Profilers Zygo ZeGage™

Zygo ZeGage™

Product Code:
ZeGage
Manufacturer: Zygo

This version of the ZeGage is no longer available. It has been superseded by the ZeGage Pro and ZeGage Pro HR. Accessories and objectives are still available.

The ideal non-contact optical profiler for quantitative measurements of 3D form and roughness on precision machined surfaces.

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This version of the ZeGage is no longer available. It has been superseded by the ZeGage Pro and ZeGage Pro HR. Accessories and objectives are still available.

Robust and affordable 3D Optical Profilers for precise surface metrology on the production floor. ZeGage is the ideal non-contact optical profiler for quantitative measurements of 3D form and roughness on precision machined surfaces.

  • Vibration resistant design provides robust metrology on production floor
  • ISO 25178 compliant texture results ensures confidence in your metrology
  • Non-contact metrology technique prevents potentially costly part damage and scrap
  • Area based measurement is insensitive to part lay
  • Measurements require no consumables

The industrial design provides fast, accurate metrology in a compact, cost-effective package that can be located directly on the factory floor without the need for vibration isolation or specialized enclosures. And the interactive control software, ZeMaps™, provides easy and detailed visualization to help you control your process. Read more to see how ZeGage Power, Versatility and Value can benefit you.

 

Powerful Performance

  • Proprietary non-contact optical technology is resistant to vibration; no vibration isolation platforms or enclosures necessary.
  • Quantitative surface metrology with nanometer-level precision provides superior gage capability.
  • Correlation to 2D and 3D standards, and compliance to ISO/DIN 25178 surface roughness parameters.
  • High resolution 1 million pixel image sensor provides fast areal measurements in seconds for excellent surface detail and visualization.
  • Integrated autofocus and focus aid simplify part setup and minimize operator variability.

Versatility

  • Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
  • Selectable magnification and field-of-view with numerous imaging and system options.
  • Included ZeMaps software provides comprehensive tools for surface data visualization, analysis and reporting.
  • Heavy duty, T-slot compatible part positioning staging enables simple, repeatable fixturing and measurement.

Productivity and Value

  • Cost-effective price-to-performance ratio compared to alternative systems, including mechanical contact stylus profilers.
  • Compact, vibration-tolerant design for easy integration anywhere in your facility.
  • Non-contact method means no consumable replacement costs to worry about.
  • Simplified operation results in low training and service costs.
  • High-output, long-life LED light source for years of trouble-free operation.
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Measurement Technique Non-contact, three-dimensional, scanning white light interferometry
Objectives 2.5x – 50x Standard Working Distance. 1x-10x Long Working Distance. Refer to the ZeScope Objective Chart for objective specifications
Z Stage 100mm travel. Head may be mounted at either of 2 heights for optimal work volume
Part Stage Manual Tip/Tilt with ±4° adj. Manual XY with 50×100 mm x/y travel. Integrated T-Slot plate for fixture attachment
Vertical Scan Range ≤20mm (objective dependent)
Data Scan Rate ≤23µm/sec
Maximum Data Points 1,048,576 per acquistion.
Optical Resolution 0.52µm to 9.50µm; objective dependent
Surface Topography Repeatability <3nm
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