Home Discontinued Optical Profilers Zygo ZeGage™ Plus

Zygo ZeGage™ Plus

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Manufacturer: Zygo

This version of the ZeGage is no longer available. It has been superseded by the ZeGage Pro and ZeGage Pro HR. Accessories and objectives are still available.

The Zygo ZeGage Plus optical profiler expands on the capabilities of the ZeGage profiler with higher precision, faster measurement speed, and an increased range of measurable surfaces – while preserving its ease of use, vibration insensitivity and small footprint.

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This version of the ZeGage is no longer available. It has been superseded by the ZeGage Pro and ZeGage Pro HR. Accessories and objectives are still available.

The ZeGage Plus profiler can measure a wider variety of surfaces – ranging from very rough to super smooth, with sub-nanometer precision, independent of field of view. Surface finishes may include ground, honed, lapped, polished and super-polished on materials such as glass, ceramic and metal.

For high-speed form measurements, the ZeGage Plus scans up to twice as fast as the ZeGage, providing faster time-to-data and increased throughput for production metrology.

As with the ZeGage profiler, the interactive control software, Mx™, provides easy and detailed visualisation to help you control your process. Read more to see how the power, versatility, and value of the ZeGage Plus profiler can benefit you.

Key Features:

  • More than 20X better surface topography repeatability over standard ZeGage,
  • Up to 2X faster vertical scan rate over standard ZeGage,
  • Measures virtually all surfaces from rough to super-smooth,
  • Vibration-resistant, for production floor metrology and process control.

Powerful Performance

  • Proprietary non-contact measurement technology has low sensitivity to vibration effects, eliminating the need for vibration isolation platforms in most applications,
  • Quantitative surface metrology with sub-nanometer precision provides superior gage capability,
  • Correlates to 2D and 3D standards, and complies with ISO 25178 surface roughness parameters,
  • High-resolution 1 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualisation,
  • Integrated autofocus and focus aid simplify part setup and minimize operator variability,
  • Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorised part stage.)


  • Measures a wide variety of surface materials and finishes, from rough to super smooth, including steep slopes and large steps,
  • 2D and 3D profiling of surface texture, form, step-height and more,
  • Non-contact metrology technique prevents part damage,
  • Selectable magnification and field-of-view with numerous imaging and system options,
  • Included Mx software provides comprehensive tools for surface data visualisation, analysis and reporting,
  • Area-based measurement is insensitive to part lay.

Productivity and Value

  • Cost-effective price-to-performance ratio compares favorably to alternative systems, including mechanical contact stylus profilers,
  • Compact, vibration-tolerant SureScan™ technology for easy integration anywhere in your facility,
  • Non-contact method means no consumable replacement costs to worry about,
  • Simplified operation results in low training and service costs,
  • High-output, long-life LED light source for years of trouble-free operation,
  • Measurements require no consumables.


Measurement Technique

Non-contact, three-dimensional, coherence scanning interferometry


1X – 50X magnification; Standard and long working distance

Z Stage

100 mm travel; head may be mounted at either of 2 heights for optimal work volume

Part Stage

Manual Tip/Tilt Stage with ±4° travel, and integrated t-slot fixture plate (standard on all configurations)

Vertical Scan Range

 20 mm (limited by obj. working distance)

Data Scan Rate ≤73µm/sec
Optical Lateral Resolution 0.52 μm (50X objective)
Surface Topography Repeatability <0.15nm

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