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Zygo Compass™ 2

Product Code:

compass2

Manufacturer: Zygo

ZYGO's Compass™ 2 metrology systems set the benchmark for automated, non-contact 3D surface metrology and process control for discrete micro lenses and molds critical to compact camera modules found in smart phones, tablets, and automotive vision systems.

Description

Production-Proven Technologies

At the core of the Compass 2 system is ZYGO’s Coherence Scanning Interferometry (CSI) based optical profiler technology, which delivers industry-leading precision, versatility and speed for repeatable metrology and production process control. Unique to Compass™ and Compass™ RT are aspheric form and deviation metrology and relational / dimensional metrology of alignment features.

There are two models of Compass 2 systems available, depending on your metrology needs

Compass 2 – ZYGO's advanced solution for precision metrology of micro lens surface form, deviation from prescription, and relational/dimensional parameters. This is the ideal choice for applications that require the analysis of rotationally symmetric spherical and aspheric, geometrically truncated, and freeform surfaces.
Compass RT – A fast and flexible system for precision metrology of micro lens relational/dimensional parameters, plus general profilometry applications. This is the ideal choice when form deviation metrology is not required.

Form and Deviation

Full surface, non-contact, 3D mapping of surface form for spherical, aspherical, and freeform lenses and molds with sub nanometer precision
Advanced analysis of form deviation from design prescription
Data integration with diamond turning machines for surface correction

Relational/Dimensional Metrology

Quantitative metrology and inspection of mechanical design features on single or dual-sided lens elements including Datum to Datum and Lens-to-Datum Characterizations

Specifications

System
Measurement Technique Applications Scanner Objectives Objective Mounting Field Zoom Lenses Field of View Illuminator Measurement Array Z-Drive (Focus) Stage Part Stage Sample Holder Vibration Isolation	Non-contact, three-dimensional, coherence scanning interferometry with field stitching Optical surface form and texture; optical surface deviation from design; relational metrology of mechanical and datum features Closed-loop piezo-based, with highly linear capacitive sensors 2.5X for relational / 20X for surface (typ); 10X and 50X optional for surface; See the Nexview & NewView Series Objective Chart for more details Motorized 4-position turret Motorized 3-position encoded zoom • 0.5X, 0.75X, 1.5X included Objective and zoom selectable Single white-light LED with long life, uniform imaging and high efficiency Selectable: 1408 x 1408, 1024 x 1024 100 mm range with 0.1 µm resolution 5-axis containing X, Y, Pitch, B, C, Vacuum Chuck for flat base pin tooling and Universal adhesive lens holder included 3D pneumatic isolation legs included Active solution optional
Physical
Dimensions (HWD) Weight	System & encl: ~160 x 116 x 106 cm Electronics Rack: ~138 x 61 x 96 cm Typ. Footprint (WD): 185 x 172 cm System & Encl: 820 kg Electronics Rack: 76 kg
Utility Requirements
Input Voltage Compressed Air for Table	100 to 240 VAC, 50/60 Hz 4.1 to 5.5 bar (60 to 80 psi); dry and filtered; 6 mm OD hose input
Environmental Requirements
Temperature Temperature Change Humidity Floor / Acoustic Vibration limits	20 to 23°C with +/- 0.1°C stability required for performance to specification <0.2°C per hr and <1°C per 24 hr maximum allowed thermal change 5 to 95% relative, noncondensing VC-C or better / NC-30 or better
Test Part Characteristics
Sample Types Material Geometries	High-precision glass or plastic injection molded lenses and optical devices, diamond-turned molds. with a CA < 8 mm for form and CA < 6.4 mm for relational Uncoated metal, glass, and plastic w/ reflectivity between 0.05% - 100% Continuous and rotationally symmetric spheres, gullwings, pancakes, and other asphere shapes plus freeforms
Specification Description	Target performance 1s reproducibility
Aspheric Surface Form Error	0.010 µm (RMS), 0.030 µm (PV)
Aspheric Surface Roughness	0.005 µm (Sa)
Lens Height	0.17 µm
Tilt Control Interlock Flatness	0.02 µm
Side1- Side2 Concentricity	0.1 µm
A1-A2 Concentricity	0.25 µm
Lens Concentricity to Interlock	0.16 µm
Interlock Diameter	0.05 µm
Thickness at Center	0.34 µm
Tilt Control Interlock Parallelism	10 arc sec
Tilt Control Interlock Thickness	0.24 µm
Measurement Modes
3D Form & Texture	Full area topography, waviness, and texture (tooling marks, artifacts, etc.) measurement defined by: ● OpticStudio & CODE V prescription
	● Unknown surface tracking
Form Deviation	Full area deviation map when lens is measured using a surface equation
Production Form Deviation Mode	Ring-spoke form deviation method for increased throughput with reduced data density
Relational	Flatness, thickness, and centration of lens surface to mechanical datums. Capability is surface dependent
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