Zygo ZPS Absolute Position Measurement System
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
- Non-contact optical measurement
- Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
- High-precision system using proprietary compensation algorithms
- Ultra-compact sensors with no EMI sensitivity or heat generation
- Reliable telecom-proven fiber optic components
- Scalable, up to 64 channels
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning. The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability. The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables.
Applications
The ZYGO ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.
PERFORMANCE CHARACTERISTICS |
|
Resolution |
10 pm |
Scale Error |
≤ 8 ppm |
Non-Linearity |
≤ ±1 nm |
Noise(1) |
5 pm/√Hz (0 to 100 μm) 10 pm/√Hz (100 to 400 μm) 20 pm/√Hz (400 to 600 μm) |
Drift |
0.1 nm/min (Short Term) 1.0 nm/day (Long Term) |
Absolute Position Repeatability |
0.5 nm 3σ |
Thermal Drift(2) |
0.1 nm/K |
TARGET REQUIREMENTS(3) |
|
Nominal Standoff |
3.5 mm |
Measurement Range(4) |
±600 μm |
Angular Range(4) |
1 mrad |
Max. Precision Velocity |
30 mm/s |
Target Reflectivity |
3% - 8% @ 1525 – 1570 nm |
PHYSICAL CHARACTERISTICS |
|
Dimensions (H x W x D) |
311 x 483 x 578 mm 19” Rack Mountable, 7U |
Mass(5) |
30 kg |
Max. No. of Channels |
64 |
OPTICAL CHARACTERISTICS |
|
Operating Wavelength |
1525 – 1570 nm |
Max. Sensor Output |
< 1 mW |
Laser Safety Rating |
1M |
CLOCKING & COMMUNICATIONS |
|
Interface |
sRIO and Ethernet |
Reference Signal |
20 MHz |
Digital Filter |
24 Hz to 104 kHz, programmable |
Base Sample Period |
4.8 μs |
Data Age |
16 μs (typical) |
Data Age Uncertainty |
< 100 ns |
SENSOR SPECIFICATIONS |
|
Dimensions (Dia. x L) |
2.8 x 27 mm |
Mass |
6 g |
REFRACTOMETER SPECIFICATIONS |
|
Dimensions (H x W x D) |
8 x 15 x 24 mm |
Mass |
14 g |
OPERATING CONDITIONS |
|
Temperature |
0° to 50°C |
Max. Temp. Variation |
±1°C |
Pressure |
700 to 1150 hPa |
Humidity |
0% to 70% (non-condensing) |
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