Abrasive Machining

• Process includes two main elements:
  • Masking - a photolithographic technique 
  • Machining - a CNC mill with an abrasive power unit

• Applications include fabrication of flexible clamp membranes for reticle chucks, and patterning wafer table surfaces

 Aspheric Surface Fabrication

• Sizes to 500 mm

• Materials: Zerodur, ULE, Glass, Ceramics, Si, CaF2

• Accuracy to λ/5000 RMS @ 633 nm

• Off-axis mirrors without parent fabrication

• Technologies:
  • Computer Controlled Optical Surfacing 
  • Ion Beam Figuring 
  • Precision optical & CMM metrology

 Computer Controlled Optical Surfacing

• Aspheres & precision sphere, flats, cylinders
• Can achieve:
  • 1 nm RMS surface figure 
  • 0.2 nm RMS surface roughness (glass)

• Configurable for glass, CaF2, Zerodur, ULE, SiC, Si, other materials and a wide range of part geometries
• Scalable for optics beyond 1.5 meters
• Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology

 Ion Beam Figuring (IBF)

This proprietary technology employs an Argon ion stream in a vacuum to locally "polish" aspherical, spherical and flat optical surfaces. Data from optical metrology is coupled with CCOS software to locally correct surface errors.

IBF offers significant advantages:

• Achieves surface figure of less than 0.25 nm RMS (?/2500 @ 633 nm)
• Insensitive to edge boundary conditions
• Works on delicate and/or easily deformed surfaces such as ultra lightweight substrates (no print through)
• Can be applied to surface geometries that are not accessible to conventional polishing tools
• Applicable to a wide range of materials including Zerodur, ULE, glass, ceramic, Si, CaF2
• Can not scratch surfaces

Precision Glass Assembly

• Class 10000 and Class 100 assembly areas
• Custom designed proprietary tooling
• Glass-to-glass and glass-to-metal bonding
• Tolerances:
  • 10 µm position 
  • 1 µm parallelism