Zygo's Extreme Precision Optics Group in Richmond, California, fabricates world-class aspheric and spherical surfaces, precision machined structures, and ultra-high precision optical assemblies, serving the Defense & Aerospace, Life Sciences, and Semiconductor markets.
With over 20 engineers, the EPO group has a distinguished heritage that has ranged from the repair of the Hubble Space Telescope to the development of sub-nanometer precision EUV optics used in today's most demanding lithographic systems.
Capabilities
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Abrasive Machining
- Process includes two main elements:
- Masking - a photolithographic technique
- Machining - a CNC mill with an abrasive power unit
- Applications include fabrication of flexible clamp membranes for reticle chucks, and patterning wafer table surfaces
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Aspheric Surface Fabrication
- Materials: Zerodur, ULE, Glass, Ceramics, Si, CaF2
- Accuracy to λ/5000 RMS @ 633 nm
- Off-axis mirrors without parent fabrication
- Technologies:
- Computer Controlled Optical Surfacing
- Ion Beam Figuring
- Precision optical & CMM metrology
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Computer Controlled Optical Surfacing
- Aspheres & precision sphere, flats, cylinders
- Can achieve:
- 1 nm RMS surface figure
- 0.2 nm RMS surface roughness (glass)
- Configurable for glass, CaF2, Zerodur, ULE, SiC, Si, other materials and a wide range of part geometries
- Scalable for optics beyond 1.5 meters
- Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology
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Ion Beam Figuring (IBF)
This proprietary technology employs an Argon ion stream in a vacuum to locally "polish" aspherical, spherical and flat optical surfaces. Data from optical metrology is coupled with CCOS software to locally correct surface errors.
IBF offers significant advantages:
- Achieves surface figure of less than 0.25 nm RMS (?/2500 @ 633 nm)
- Insensitive to edge boundary conditions
- Works on delicate and/or easily deformed surfaces such as ultra lightweight substrates (no print through)
- Can be applied to surface geometries that are not accessible to conventional polishing tools
- Applicable to a wide range of materials including Zerodur, ULE, glass, ceramic, Si, CaF2
- Can not scratch surfaces
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Precision Glass Assembly
- Class 10000 and Class 100 assembly areas
- Custom designed proprietary tooling
- Glass-to-glass and glass-to-metal bonding
- Tolerances:
- 10 µm position
- 1 µm parallelism
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› EUR (Europe)