Absolute Position Measurement
Absolute Position Measurement
The ZPS™ system provides high-precision non-contact absolute position measurement on up to 64 synchronized channels over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
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Zygo ZPS Absolute Position Measurement System
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
- Non-contact optical measurement
- Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
- High-precision system using proprietary compensation algorithms
- Ultra-compact sensors with no EMI sensitivity or heat generation
- Reliable telecom-proven fiber optic components
- Scalable, up to 64 channels
