Displacement Measuring Interferometers

Displacement Measuring Interferometers

Displacement Measuring Interferometers

ZYGO position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging systems. ZYGO have pioneered innovations in the displacement position sensors for over 30 years, and work closely with applications requiring the highest ...
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  • ZYGO ZMI™ Lasers

    ZYGO ZMI™ lasers provide highly stabilised, two-frequency output which provides a firm foundation for high-precision position metrology. These lasers are based on robust Helium Neon technology that has high reliability and is used as a standard definition of the meter.

     

  • ZYGO Interferometers

    ZYGO’s standard interferometer configurations support many types of measurement scenarios. Most interferometers can support a straight-through or right-angle measurement orientation and can be manufactured for operation in vacuum.

  • ZYGO Measurement Electronics

    ZYGO ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.

     

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