ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. They have pioneered innovations in the displacement and position sensors for over 30 years, and work ...
ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. They have pioneered innovations in the displacement and position sensors for over 30 years, and work closely with applications requiring the highest precision and reliability.