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ZYGO QPSI Technology

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Manufacturer: Zygo

ZYGO's patented QPSI™ technology is truly a breakthrough in precision optical testing – it eliminates noise and ripple in phase data due to small vibrations, providing reliable data that would otherwise be noisy with traditional PSI acquisition. QPSI measurements require no special setup or calibration, and cycle times are typically equivalent to standard PSI measurements.


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Animated comparison of a PSI measurement with fringe print-through due to vibration, and the same surface measured with QPSI™ technology – free of noisy print-through.

QPSI is available exclusively from ZYGO and is included as standard equipment on Verifire, DynaFiz, Verifire HD, Verifire MST, and many infrared and large aperture interferometer systems. These systems are easy-to-use, on-axis, common-path Fizeau interferometers – the industry standard for reliable metrology – making them the logical choice for most optical surface form and transmitted wavefront measurements.

A ZYGO interferometer with QPSI technology enables reliable high-precision measurements in the presence of vibration from common sources such as motors, pumps, blowers, and personnel. The patented on-axis temporal phase shifting acquisition is enabled by unique software algorithms, as well as the ZYGO-made HeNe laser which delivers higher power to freeze vibration on a frame-by-frame basis.

Key Features:

  • Eliminates ripple and fringe print-through due to vibration
  • High-precision measurement; same as phase-shifting interferometry (PSI)
  • Requires no calibration, and no changes to your setup
  • Easily enabled/disabled with a mouse click
  • Included with all standard ZYGO interferometer mainframes



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