MProbe 20 Series: Thin Film Thickness Measurement

The system is user friendly and easy to setup – you will be ready to start measurements right away. Everything is included for samples measurement: spectrometer/ light source (main unit), fibre optics probe, sample stage, software, calibration/reference sample.

Our extensive materials library has 500+ materials. New materials can be easily imported or created/added to the library. Support for a wide range of parameterised materials (from Cauchy to Tauc-Lorentz, etc.) is included.

One-click measurement combines data acquisition and data analysis. 

For advanced users, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimisation, layers and materials linking, etc. that can be used for advanced applications development.

Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc.

Why use MProbe
Flexible: select the best hardware configuration for your application
Affordable: up to 50% savings as compared to other commercial instruments
Precision: unmatched precision <0.01nm or 0.01%
Materials database: extended database (500+ materials) is included
Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.
Integration: several integration options are available: Modbus TCP, OPC (DA 2.0/3.0), custom options
Technical support: application and technical support

What’s in the box?

• Main unit (includes spectrometer(s), light source, electronics)
• Reflectance probe
• Sample table with reflectance probe holder
• TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB memory stick )
• Calibration set: reference wafer (Si or Al depending on the model, or/and Quartz plate (optional)) and black absorber/pad
• Test sample- 200nm oxide wafer
• USB cable (connecting main unit to computer)
• Universal power adapter (110V/220V)

In addition, MProbe includes the following Semiconsoft advantages:

• Library with over 500 materials and support for parameterised materials
• 12 months of free software updates and application support
• Hardware upgrade program

System model can be selected based on the required thickness and/or wavelength range. Custom configurations that combine features of different models are available on request. Please let us know your application and we will offer a solution