Thursday, May 20, 2021 4:00 PM - 5:00 PM BST
As semiconductor manufacturers seek to produce ever-smaller node sizes, vibration control becomes an increasingly important factor in yield, failure analysis, and throughput. Fabs must consider the effects of facility floor vibration as well as tool-generated vibration on tool performance, for both front-end and back-end processes. This webinar will cover active vibration cancellation technologies for controlling both tool-generated vibration and facility floor vibration in semiconductor manufacturing.