Zygo Verifire™ VTS Interferometer

ZYGO's fully-integrated turnkey system features a motorised Z-axis stage with 1 meter of encoded travel, which simplifies part positioning and enables automated radius of curvature measurements. The system can be configured with a 4-inch ZYGO Verifire™, or any current 4- or 6-inch Verifire™ HD or Dynafiz® interferometer. The compact footprint requires minimal floor space ideal for the shop floor.

Key Features:

• Robust design, built for production environments
• Turnkey system with compact footprint
• Integrated passive vibration isolation system
• Flexible configuration; choose your mainframe
• Mx™ software with radius of curvature encoder feedback
• Programmable and automation ready Optional safety enclosure with light curtain interlock

Vibration Robust
ZYGO's Verifire™ VTS features a rigorous mechanical design with integrated passive vibration isolation system to provide a stable metrology cell for confidence in your measurement results. Going further, all standard interferometers include ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. Select standard 4-inch Verifire™ or 4-inch / 6-inch Dynafiz mainframes for QPSI to enable true on-axis metrology without degradation to data maps from typical production vibrations.

Mx™ Software
ZYGO's Mx™ measurement and analysis software offers a wide range of features and flexible configuration that can be adapted for environments from 'easy-to-use' for operators on the production floor to "full-featured" for high-end applications in the R&D or engineering lab. New features like SmartAveraging® technology, Custom Workspace, and integrated Python™ scripting language further simplify the user experience, or greatly expand the functionality of the interferometer as needed in your application.