Home Surface Form & Transmitted Wavefront Zygo VeriFire XL Interferometer

Zygo VeriFire XL Interferometer

Product Code:
Zygo Verifire XL
Manufacturer: Zygo
The Zygo Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

More info and finance questions

Request a Quote

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.

Key Features:

  • 12" (300 mm) aperture
  • Compact footprint, self-contained system
  • Easy part loading and alignment
  • Simple setup and streamlined operation
  • Built-in pre-aligned transmission flat
  • Integrated vibration isolation and QPSI technology for reliable measurements in production environments

Vibration Robust

The Verifire XL system includes Zygo's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Accurate Metrology

The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy. 

Mx™ Software

ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes Smart Averaging technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations. 

 

 

Write Your Own Review
You're reviewing:Zygo VeriFire XL Interferometer
Your Rating
Photo Product
Zygo Verifire™ Interferometer Zygo Verifire™ Interferometer >
Zygo Verifire™ VTS Interferometer Zygo Verifire™ VTS Interferometer >
VeriFire & GPI Accessories VeriFire & GPI Accessories >
Zygo VeriFire HD Interferometer Zygo VeriFire HD Interferometer >
Zygo DynaFiz® Series Zygo DynaFiz® Series >
Zygo VeriFire MST Interferometer Zygo VeriFire MST Interferometer >
Zygo Verifire™ HDX  Interferometer Zygo Verifire™ HDX Interferometer >
Zygo VeriFire Asphere Interferometer Zygo VeriFire Asphere Interferometer >
Large Aperture Systems Large Aperture Systems >
Zygo Expanded Wavelength Capabilities Zygo Expanded Wavelength Capabilities >
Zygo GPI™ CAN Upgrade Zygo GPI™ CAN Upgrade >
Zygo Trade-ins & Upgrades Special Offer for used Metrology Systems Zygo Trade-ins & Upgrades Special Offer for used Metrology Systems >