Zygo VeriFire XL Interferometer
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
Key Features:
- 12" (300 mm) aperture
- Compact footprint, self-contained system
- Easy part loading and alignment
- Simple setup and streamlined operation
- Built-in pre-aligned transmission flat
- Integrated vibration isolation and QPSI technology for reliable measurements in production environments
Vibration Robust
The Verifire XL system includes Zygo's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
Accurate Metrology
The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
Mx™ Software
ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes Smart Averaging technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.
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