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Zygo VeriFire Asphere Interferometer

Product Code:
Zygo VeriFire Asphere
Manufacturer: Zygo
The first metrology tool for fast, noncontact, high-accuracy 3D metrology of aspheric surfaces. Production-friendly features include automated alignment, acquisition, and analysis.

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Fast, Noncontact, High-Accuracy 3D Metrology of Aspheric Surfaces

The VeriFire Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces using patented noncontact interferometric techniques for production and process control.

Based on two of ZYGO's core competencies, the patented multi-zoned metrology method provides a high resolution measurement of an aspheric surface. With multiple axes of motorized stages, the VeriFire Asphere offers automated alignment, acquisition and analysis. The result is a fast, high resolution quantitative aspheric surface measurement.

Key Features

  • Fast and flexible aspheric metrology
  • Noncontact measurement maintains surface integrity
  • Easy set-up and alignment results in excellent production throughput
  • High resolution 3D result ensures measurement of localised surface features

 

 

ASPHERIC MEASUREMENT PERFORMANCE  
Form Uncertainty ≤ 30°: ≥ F/1.0 ⇒ 60 nm (λ/10)
  ≤ 45°: F/0.71 ⇒ 100 nm (λ/6)
  ≤ 60°: F/0.58 ⇒ 200 nm (λ/3)
Alignment Semi-automated computer alignment
Simple Repeatability ≤3 nm (λ/200) RMS
Surface Measurement Repeatability ≤10 nm (λ/60) RMS
Height Resolution 0.08 nm
TACT 6 - 10 minutes (typical)
TEST PART CHARACTERISTICS  
Material Various including glass, metals, ceramics and plastics
Aspheric Shape Axially symmetric concave or convex shape with specular surface and a measurable apex
Departure from asphere design Up to 10 µm
Departure from vertex sphere R0 Approximately 800 µm
Part Diameter 1 mm to 130 mm
Part Weight ≤ 5 kg
Reflectivity 0.1% to 100%(based on transmission element)

 

 

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